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Paper detail

Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics

Some possible applications of the low-angle mid-IR-light scattering technique and some recently developed on its basis methods for non-destructive inspection and investigation of semiconductor materials and structures are discussed in the paper. The conclusion is made that the techniques in question might be very useful for solving a large number of problems regarding defect investigations and quality monitoring both in research laboratories and the industry of microelectronics

preprint2011arXivOpen access
V. P. KalinushkinV. A. YuryevO. V. AstafievA. N. BuzyninN. I. Bletskan
cond-mat.mtrl-sciphysics.optics
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V. P. KalinushkinV. A. YuryevO. V. AstafievA. N. BuzyninN. I. Bletskan

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