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Yuxin Du

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2 published item(s)

preprint2026arXiv

Effects of thermal annealing and film thickness on the structural and optical properties of indium-tin-oxide thin films

Indium-tin oxide (ITO) is a crucial functional layer for the optoelectronic applications, such as non-volatile color display thin films based on the ITO/phase-change material (PCM)/ITO/reflective metal multilayer structures on a silicon substrate. In addition to non-volatile color tuning by PCMs, thermally induced crystallization may alter the optical properties of ITO layers as well. But the potential change in color of the ITO layers is not considered so far. In this work, we investigate the structural and optical properties of ITO thin films via X-ray diffraction, spectroscopic ellipsometry and ultraviolet-visible spectrophotometry measurements. After thermal annealing at 250 °C, the ITO thin films of 15-100 nm get crystallized with strong changes in refractive index n and extinction coefficient k in the visible light range. However, for the 5-nm ITO thin film, crystallization is only observed after thermal annealing at 350 °C and the change in color is limited upon phase transition. We provide a colormap of the ITO/platinum/silicon structure in terms of the annealing temperature (150-350 °C) and ITO film thickness (5-100 nm). Our work suggests that the intrinsic change in colors of ITO layers should also be considered for the PCM-based reconfigurable display application.

preprint2026arXiv

Evo-Depth: A Lightweight Depth-Enhanced Vision-Language-Action Model

Vision-Language-Action models have emerged as a promising paradigm for robotic manipulation by unifying perception, language grounding, and action generation. However, they often struggle in scenarios requiring precise spatial understanding, as current VLA models primarily rely on 2D visual representations that lack depth information and detailed spatial relationships. While recent approaches incorporate explicit 3D inputs such as depth maps or point clouds to address this issue, they often increase system complexity, require additional sensors, and remain vulnerable to sensing noise and reconstruction errors. Another line of work explores implicit 3D-aware spatial modeling directly from RGB observations without extra sensors, but it often relies on large geometry foundation models, resulting in higher training and deployment costs. To address these challenges, we propose Evo-Depth, a lightweight depth-enhanced VLA framework that enhances spatially grounded manipulation without relying on additional sensing hardware or compromising deployment efficiency. Evo-Depth employs a lightweight Implicit Depth Encoding Module to extract compact depth features from multi-view RGB images. These features are incorporated into vision-language representations through a Spatial Enhancement Module via depth-aware modulation, enabling efficient spatial-semantic enhancement. A Progressive Alignment Training strategy is further introduced to align the resulting depth-enhanced representations with downstream action learning. With only 0.9B parameters, Evo-Depth achieves superior performance across four simulation benchmarks. In real-world experiments, Evo-Depth attains the highest average success rate while also exhibiting the smallest model size, lowest GPU memory usage, and highest inference frequency among compared methods.