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Jia Qi

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Published work

7 published item(s)

preprint2022arXiv

3D large-scale fused silica microfluidic chips enabled by hybrid laser microfabrication for continuous-flow UV photochemical synthesis

We demonstrate a hybrid laser microfabrication approach, which combines the technical merits of ultrafast laser-assisted chemical etching and carbon dioxide laser-induced in-situ melting, for centimeter-scale and bonding-free fabrication of 3D complex hollow microstructures in fused silica glass. With the developed approach, large-scale fused silica microfluidic chips with integrated 3D cascaded micromixing units can be reliably manufactured. High-performance on-chip mixing and continuous-flow photochemical synthesis under UV LEDs irradiation at ~280 nm were demonstrated using the manufactured chip, indicating a powerful capability for versatile fabrication of highly transparent all-glass microfluidic reactors for on-chip photochemical synthesis.

preprint2020arXiv

Incubation Induced Light Concentration Beyond the Diffraction Limit for High-Resolution Glass Printing

In the past two decades, tremendous efforts have been exerted to understand and control the delivery of ultrashort laser pulses into various types of transparent materials ranging from glass and crystal to polymer and even bio-materials. This approach opens up the route toward determinative and highly localized modification within the transparent materials, enabling three-dimensional (3D) micromachining of the materials into sophisticated structures and devices with the extreme geometrical flexibility. Owing to the linear diffraction and nonlinear self-focusing effects, the focal volume typically exhibits an asymmetric profile stretching along the longitudinal direction. This effect becomes more severe when focusing deeply into the transparent substrates for printing objects of large heights. In this work a new laser-material interaction regime is identified with the exceptional incubation effect originating from self-regulated multiple-pulse interactions with accumulated material changes. Our finding reveals a focal-volume-invariant modification deeply inside the fused silica glass, in striking contrary to the traditional believes that the geometrical shape of the laser induced modification follows the intensity distribution of the inscription laser. A macro-scale geometrically complex glass sculpture is successfully manufactured with the incubation assisted ultrashort laser inscription at uniform micrometer resolutions in all three dimensions.

preprint2019arXiv

A compact and efficient three-dimensional microfluidic mixer

Microfluidic mixing is a fundamental functionality in most lab on a chip (LOC) systems,whereas realization of efficient mixing is challenging in microfluidic channels due to the small Reynolds numbers. Here, we design and fabricate a compact three-dimensional (3D) micromixer to enable efficient mixing at various flow rates. The performance of the fabricated micromixer was examined using blue and red inks. The extreme flexibility in fabricating microfluidic structures of arbitrary 3D geometries using femtosecond laser micromachining allows us to tackle the major disadvantageous effects for optimizing the mixing efficiency.

preprint2018arXiv

Polarization-insensitive space-selective etching in fused silica induced by picosecond laser irradiation

It is well known that when the fused silica is irradiated with focused femtosecond laser beams, space selective chemical etching can be achieved. The etching rate depends sensitively on the polarization of the laser. Surprisingly, we observe that by chirping the Fourier-transform-limited femtosecond laser pulses to picosecond pulses, the polarization dependence of the etching rate disappears, whereas an efficient etching rate can still be maintained. Observation with a scanning electron microscope reveals that the chirped pulses can induce interconnected nanocracks in the irradiated areas which facilitates efficient introduction of the etchant into the microchannel. The reported technology is of great use for fabrication of three-dimensional (3D) microfluidic systems and glass-based 3D printing.

preprint2016arXiv

Fabrication of polarization-independent single-mode waveguides in lithium niobate crystal with femtosecond laser pulses

We report on fabrication of depressed cladding optical waveguides buried in lithium niobate crystal with shaped femtosecond laser pulses. Depressed cladding waveguides of variable mode-field sizes are fabricated by forming the four sides of the cladding using a slit-beam shaping technique. We show that the waveguides fabricated by our technique allows single-mode propagation of the light polarized in both vertical and horizontal directions.

preprint2016arXiv

Fabrication of polarization-independent waveguides deeply buried in crystal using aberration-corrected femtosecond laser direct writing

Writing optical waveguides with femtosecond laser pulses provides the capability of forming three-dimensional photonic circuits for manipulating light fields in both linear and nonlinear manners. To fully explore this potential, large depths of the buried waveguides in transparent substrates are often desirable to facilitate achieving vertical integration of waveguides in a multi-layer configuration, which, however, is hampered by rapidly degraded axial resolution caused by optical aberration. Here, we show that with the correction of the spherical aberration, polarization-independent waveguides can be inscribed in a nonlinear optical crystal lithium niobate (LN) at depths up to 1.4 mm, which is more than one order of magnitude deeper than the waveguides written with aberration uncorrected femtosecond laser pulses. Our technique is beneficial for applications ranging from miniaturized nonlinear light sources to quantum information processing.

preprint2016arXiv

Transverse writing of three-dimensional tubular optical waveguides in glass with slit-shaped femtosecond laser beams

We report on fabrication of tubular optical waveguides buried in ZBLAN glass based on transverse femtosecond laser direct writing. Irradiation in ZBLAN with focused femtosecond laser pulses leads to decrease of refractive index in the modified region. Tubular optical waveguides of variable mode areas are fabricated by forming the four sides of the cladding with slit-shaped femtosecond laser pulses, ensuring single mode waveguiding with a mode field dimension as small as ~ 4 μm.