Abstract
A method to calculate particle fluxes applicable in most of the spectroscopy techniques is described. Flux intensities of backscattered or absorbed electrons and emitted photons are calculated using a method of convergence to solve the Invariant Embedding equations that are used to describe the particle trajectories inside a solid sample. Our results are found to be helpful to carry out a procedure for quantitative characterization using instrument such as Electron Probe Microanalysis or other probes. Examples of application to calculate the composition of ternary alloys are given and are compared with the same calculations using another procedure.
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