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Key factors of ion induced nanopatterning

We have reported the dependence of projectile mass, chemical reactivity and effect of molecular beams on the ion induced nano structure formation, when 8 keV He1+, N1+, O1+, Ar1+ atomic ions and 16 keV N21+ and O21+ molecular ions are bombarded on the Si(100) surface at an incidence angle of 60^{\circ}. Atomic force microscopy (AFM) measurement shows that the initiation and growth of ripple structures are determined not only by the collision cascades but also by the chemical reactivity and molecular state of the projectiles. This experimental investigation explores the necessary requirements for ion induced controlled nanopatterning.