Paper detail

Dynamics of a free boundary problem with curvature modeling electrostatic MEMS

The dynamics of a free boundary problem for electrostatically actuated microelectromechanical systems (MEMS) is investigated. The model couples the electric potential to the deformation of the membrane, the deflection of the membrane being caused by application of a voltage difference across the device. More precisely, the electrostatic potential is a harmonic function in the angular domain that is partly bounded by the deformable membrane. The gradient trace of the electric potential on this free boundary part acts as a source term in the governing equation for the membrane deformation. The main feature of the model considered herein is that, unlike most previous research, the small deformation assumption is dropped, and curvature for the deformation of the membrane is taken into account what leads to a quasilinear parabolic equation. The free boundary problem is shown to be well-posed, locally in time for arbitrary voltage values and globally in time for small voltages values. Furthermore, existence of asymptotically stable steady-state configurations is proved in case of small voltage values as well as non-existence of steady-states if the applied voltage difference is large. Finally, convergence of solutions of the free boundary problem to the solutions of the well-established small aspect ratio model is shown.