Abstract
We demonstrate the capability of block-copolymer templating to tune the refractive indices of functional oxides over a broad range by structuring materials on the 20-1000 atoms scale, with simple one-pot synthesis. The presented method is then combined with genetic algorithm-based optimization to explore its application for anti-reflection coating design. Merging these techniques allows for the realization of a minimal two-layer anti-reflection stack for silicon with broadband reflectivity of just 3% from the nominal value of 38%, over a 120° angular span, validated by fabrication followed by optical measurements.
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