A free boundary problem modeling electrostatic MEMS: I. Linear bending effects

The dynamical and stationary behaviors of a fourth-order evolution equation with clamped boundary conditions and a singular nonlocal reaction term, which is coupled to an elliptic free boundary problem on a non-smooth domain, are investigated. The equation arises in the modeling of microelectromechanical systems (MEMS) and includes two positive parameters $λ$ and $\varepsilon$ related to the applied voltage and the aspect ratio of the device, respectively. Local and global well-posedness results are obtained for the corresponding hyperbolic and parabolic evolution problems as well as a criterion for global existence excluding the occurrence of finite time singularities which are not physically relevant. Existence of a stable steady state is shown for sufficiently small $λ$. Non-existence of steady states is also established when $\varepsilon$ is small enough and $λ$ is large enough (depending on $\varepsilon$).

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