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Yiliang Bao

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physics.ins-det physics.app-ph physics.optics

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preprint2025arXiv

Accurate, precise pressure sensing with tethered optomechanics

We show that optomechanical pressure sensors with characterized density and thickness can achieve uncertainty as low as 1.1 % via comparison with a secondary pressure standard. The agreement between the secondary standard and our optomechanical sensors is a necessary step towards using optomechanical devices as primary pressure sensors. Our silicon nitride and silicon carbide sensors are short-term and long-term stable, displaying Allan deviations compatible with better than 1 % precision and baseline drift significantly lower than the secondary standard. Our measurements also yield the in situ thin-film density of our sensors with 1 % total uncertainty or lower, aiding development of other optomechanical sensors. Our results demonstrate that optomechanical pressure sensors can achieve accuracy, precision, and drift sufficient to replace high performance legacy pressure gauges.

preprint2022arXiv

Intrinsically accurate sensing with an optomechanical accelerometer

We demonstrate a microfabricated optomechanical accelerometer that is capable of percent-level accuracy without external calibration. To achieve this capability, we use a mechanical model of the device behavior that can be characterized by the thermal noise response along with an optical frequency comb readout method that enables high sensitivity, high bandwidth, high dynamic range, and SI-traceable displacement measurements. The resulting intrinsic accuracy was evaluated over a wide frequency range by comparing to a primary vibration calibration system and local gravity. The average agreement was found to be 2.1 % for the calibration system between 0.1 kHz and 15 kHz and better than 0.2 % for the static acceleration. This capability has the potential to replace costly external calibrations and improve the accuracy of inertial guidance systems and remotely deployed accelerometers. Due to the fundamental nature of the intrinsic accuracy approach, it could be extended to other optomechanical transducers, including force and pressure sensors.

preprint2020arXiv

Broadband Optomechanical Sensing at the Thermodynamic Limit

Cavity optomechanics has opened new avenues of research in both fundamental physics and precision measurement by significantly advancing the sensitivity achievable in detecting attonewton forces, nanoparticles, magnetic fields, and gravitational waves. A fundamental limit to sensitivity for these measurements is energy exchange with the environment as described by the fluctuation-dissipation theorem. While the limiting sensitivity can be increased by increasing the mass or reducing the damping of the mechanical sensing element, these design tradeoffs lead to larger detectors or limit the range of mechanical frequencies that can be measured, excluding the bandwidth requirements for many real-world applications. We report on a microfabricated optomechanical sensing platform based on a Fabry-Perot microcavity and show that when operating as an accelerometer it can achieve nearly ideal broadband performance at the thermodynamic limit (Brownian motion of the proof mass) with the highest sensitivity reported to date over a wide frequency range ($314\,nm \cdot s^{-2}/\sqrt{Hz}$ over 6.8 kHz). This approach is applicable to a range of measurements from pressure and force sensing to seismology and gravimetry, including searches for new physics such as non-Newtonian gravity or dark matter.