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Ulrike Wallrabe

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Published work

11 published item(s)

preprint2020arXiv

Micro Fresnel Mirror Array with Individual Mirror Control

We present the design and fabrication of a miniaturized array of piezoelectrically actuated high speed Fresnel mirrors with individual mirror control. These Fresnel mirrors can be used to generate propagation invariant and self-healing interference patterns. The mirrors are actuated using piezobimorph actuators, and the consequent change of the tilting angle of the mirrors changes the fringe spacing of the interference pattern generated. The array consists of four Fresnel mirrors each having an area of 2x2 mm2 arranged in a 2x2 configuration. The device, optimized using FEM simulations, is able to achieve maximum mirror deflections of 15 mrad, and has a resonance frequency of 28 kHz.

preprint2019arXiv

Integrated Sensor System to Control the Temperature Effects and the Hysteresis on Adaptive Fluid-Membrane Piezoelectric Lenses

We present in this paper an integrated sensor system for closed-loop control of the temperature effects and the hysteresis on the refractive power of an adaptive fluid-membrane piezoelectric lens. The piezoelectric hysteresis and the fluid thermal expansion contribute to a nonlinear response of the lens refractive power defined as a function of the actuation electric field. Hence, a pressure sensor and a temperature sensor are integrated inside the lens to monitor and define the lens refractive power as a function of both the internal fluid pressure and the temperature, thus, allowing for the closed-loop control of the refractive power. The adaptive lens has a refractive power range varying from -16 m-1 to +17 m-1 at 25°C and from -15 m-1 to +28 m 1 at 75°C.

preprint2016arXiv

Single-Sided Contacting of Out-of-Plane Polarized Piezo Films for Fluid Membrane Lenses

We present an adaptive lens which tunes its focal length with a glass membrane that is deformed by an integrated piezo bending actuator. A particular challenge in the fabrication of this type of actuator is the need to contact the electrodes on both sides of the piezo element, i.e. also on the glass surface. Therefore, we show a novel contacting method where the top electrode on the piezo is segmented and the backside electrode is left at a floating potential. With this setup we achieve tuning capabilities of more than 13 dpt and response times in the range of less than 4 ms at a usable aperture of 4.5 mm.

preprint2016arXiv

Topological in-plane polarized piezo actuation for compact adaptive lenses with aspherical correction

In this contribution, we investigate the effects of using in-plane polarized piezo actuators with topological buckling displacement to drive glass-piezo composite membranes for adaptive lenses with aspherical control. We find that the effects on the focal power and aspherical tuning range are relatively small, whereas the tuning speed is improved significantly with a first resonance of 1 kHz for a 13 mm aperture lens.

preprint2014arXiv

A compact, large-aperture tunable lens with adaptive spherical correction

In this paper, we present the proof of concept of a very fast adaptive glass membrane lens with a large aperture/diameter ratio, spherical aberration correction and integrated actuation. The membrane is directly deformed using two piezo actuators that can tune the focal length and the conical parameter. This operating principle allows for a usable aperture of the whole membrane diameter. Together with the efficient actuation mechanism, the aperture is around 2/3 of the total system diameter - at a thickness of less than 2mm. The response time is a few milliseconds at 12mm aperture, which is fast compared to similar systems.

preprint2014arXiv

Magnetic properties of materials for MR engineering, micro-MR and beyond

We present the results of a systematic measurement of the magnetic susceptibility of small material samples in a 9.4 T MRI scanner. We measured many of the most widely used materials in MR engineering and MR micro technology, including various polymers, optical and substrate glasses, resins, glues, photoresists, PCB substrates and some fluids. Based on our data, we identify particularly suitable materials with susceptibilities close to water. For polyurethane resins and elastomers, we also show the MR spectra, as they may be a good substitute for silicone elastomers and good casting resins.

preprint2014arXiv

Piezo films with adjustable anisotropic strain for bending actuators with tunable bending profiles

We present a method to produce in-plane polarized piezo films with a freely adjustable ratio of the strains in orthogonal in-plane directions. They can be used in piezo bending actuators with a tunable curvature profile. The strains are obtained as mean strains from a periodic polarization pattern produced by a suitable doubly interdigitated electrode structure. This mechanism is demonstrated for several examples using PZT sheets. We further discuss how this tuning and the parameters of the electrode layout affect the overall magnitude of the displacement.

preprint2013arXiv

A new dimension for piezo actuators: Free-form out-of-plane displacement of single piezo layers

We present a controlled mode of "topological" displacement of homogeneous piezo films that arises solely from an inhomogeneous in-plane strain due to an inhomogeneous polarization. For the rotationally symmetric case, we develop a theoretical model that analytically relates the shape of the displacement to the polarization for the cases of in-plane and out-of-plane polarization. This is verified for several examples, and we further demonstrate controlled asymmetric deformations.

preprint2013arXiv

Focusing Mirror with Tunable Eccentricity

We present a new kind of varifocal mirror with independently adjustable curvatures in the major directions. For actuation we use two stacked piezo bending actuators with crossed in-plane polarization. This mirror can be used for example as an off-axis focusing device with tunable focal length and compensation for a variable angle of incidence or for coma correction. We demonstrate the prototype of such a mirror and characterize the mechanical deflection, as well as the focusing capabilities.

preprint2013arXiv

Freeform high-speed large-amplitude deformable Piezo Mirrors

We present a new type of tunable mirror with sharply-featured freeform displacement profiles, large displacements of several 100μm and high operating frequencies close to the kHz range at 15mm diameter. The actuation principle is based on a recently explored "topological" displacement mode of piezo sheets. The prototypes presented here include a rotationally symmetric axicon, a hyperbolic sech-icon and a non-symmetric pyram-icon and are scalable to smaller dimensions. The fabrication process is economic and cleanroom-free, and the optical quality is sufficient to demonstrate the diffraction patterns of the optical elements.