BZPEERPapers, people, evidence and research paths
Menu

Discover

SearchFind papers, people, topics, institutions and opportunities from one place.GraphSee how papers, authors, topics and evidence connect.

Research tools

HomeContinue from the papers, people and topics that matter now.CollectionsTurn saved papers into reading lists, evidence maps and shareable context.ResearchReconstruct the path that led you from search to paper to question.CollaborationMove from a paper, topic or expert request into a focused thread.PublishCreate full-text research articles with metadata, formulas and versions.

Network

ExpertsFind specialists whose work and reviews explain why they can help.CommunitiesJoin research groups organized around papers, topics and shared evidence.

Opportunities

ListingsBrowse roles, calls and collaborations connected to real research context.

Account

Log inReturn to your saved papers, graph views and active threads.Create accountStart saving papers, building a research trail and joining teams.
Log inCreate account

Source author record

Thomas Mussenbrock

Thomas Mussenbrock appears in the imported research catalog. Authorship, coauthor and topic links are available while profile ownership is still unclaimed.

ResearcherUnclaimed source record
physics.plasm-phphysics.comp-phcond-mat.mtrl-scicond-mat.mes-hallEmerging Technologiesphysics.flu-dyn

Catalog footprint

What is connected

18works
6topics
4close collaborators

Actions

Connect this record

Log in to claim
Open graphBrowse works

Research graph

See the researcher in context

Open full explorer

Inspect adjacent papers, topics, institutions and collaborators without losing the researcher page.

Building this map preview

BZPEER is loading the nearby papers, people, topics and institutions for this page.

Published work

18 published item(s)

preprint2022arXiv

Charge-optimized many-body interaction potential for AlN revisited to explore plasma-surface interactions

Plasma-surface interactions during AlN thin film sputter deposition could be studied by means of reactive molecular dynamics (RMD) methods. This requires an interaction potential that describes all species as well as wall interactions (e.g., particle emission, damage formation) appropriately. However, previous works focused on the establishment of AlN bulk potentials. Although for the third-generation charge-optimized many-body (COMB3) potential at least a single reference surface was taken into account, surface interactions are subject to limited reliability only. The demand for a revised COMB3 AlN potential is met in two steps: First, the Ziegler-Biersack-Littmark potential is tapered and the variable charge model QTE$^+$ is implemented to account for high-energy collisions and distant charge transport, respectively. Second, the underlying parameterization is reworked by applying a self-adaptive evolution strategy implemented in the GARFfield software. Four wurtzite, three zinc blende and three rock salt surfaces are considered. An example study on the ion bombardment induced particle emission and point defect formation reveals that the revised COMB3 AlN potential is appropriate for the accurate investigation of plasma-surface interactions by means of RMD simulations.

0 citations0 reviewsNo code linkedOpen access
preprint2022arXiv

Molecular Dynamics Study on the Role of Ar Ions in the Sputter Deposition of Al Thin Films

Molecular dynamics simulations are often used to study sputtering and thin film growth. Compressive stresses in these thin films are generally assumed to be caused by a combination of forward sputtered (peened) built-in particles and entrapped working gas atoms. While the former are assumed to hold a predominant role, the effect of the latter on the interaction dynamics as well as thin film properties are scarcely clarified (concurrent or causative). The inherent overlay of the ion bombardment induced processes render an isolation of their contribution impracticable. In this work, this issue is addressed by comparing the results of two case studies on the sputter deposition of Al thin films in Ar working gas. In the first run Ar atoms are fully retained. In the second run they are artificially neglected, as implanted Ar atoms are assumed to outgas anyhow and not alter the ongoing dynamics significantly. Both case studies have in common that the consecutive impingement of 100 particles (i.e., Ar$^+$ ions, Al atoms) onto Al(001) surfaces for ion energies in the range of 3 eV to 300 eV as well as Al/Ar$^+$ flux ratios from 0 to 1 are considered. The surface interactions are simulated by means of hybrid reactive molecular dynamics/force-biased Monte Carlo simulations and characterized in terms of mass density, Ar concentration, biaxial stress, shear stress, ring statistical connectivity profile, Ar gas porosity, Al vacancy density, and root-mean-squared roughness. Ultimately, implanted Ar atoms are found to form subnanometer sized eventually outgassing clusters for ion energies exceeding 100 eV. They fundamentally govern a variety of surface processes (e.g., forward sputtering/peening) and surface properties (e.g., compressive stresses) in the considered operating regime.

0 citations0 reviewsNo code linkedOpen access
preprint2021arXiv

Stochastic behaviour of an interface-based memristive device

A large number of simulation models have been proposed over the years to mimic the electrical behaviour of memristive devices. The models are based either on sophisticated mathematical formulations that do not account for physical and chemical processes responsible for the actual switching dynamics or on multi-physical spatially resolved approaches that include the inherent stochastic behaviour of real-world memristive devices but are computationally very expensive. In contrast to the available models, we present a computationally inexpensive and robust spatially 1D model for simulating interface-type memristive devices. The model efficiently incorporates the stochastic behaviour observed in experiments and can be easily transferred to circuit simulation frameworks. The ion transport, responsible for the resistive switching behaviour, is modelled using the kinetic Cloud-In-a-Cell scheme. The calculated current-voltage characteristics obtained using the proposed model show excellent agreement with the experimental findings.

0 citations0 reviewsNo code linkedOpen access
preprint2021arXiv

Validation of the smooth step model by particle-in-cell/Monte Carlo collisions simulations

Bounded plasmas are characterized by a rapid but smooth transition from quasi-neutrality in the volume to electron depletion close to the electrodes and chamber walls. The thin non-neutral region, the boundary sheath, comprises only a small fraction of the discharge domain but controls much of its macroscopic behavior. Insights into the properties of the sheath and its relation to the plasma are of high practical and theoretical interest. The recently proposed smooth step model provides a closed analytical expression for the electric field in a planar, radio-frequency modulated sheath. It represents (i) the space charge field in the depletion zone, (ii) the generalized Ohmic and ambipolar field in the quasi-neutral zone, and (iii) a smooth interpolation for the transition in between. This investigation compares the smooth step model with the predictions of a more fundamental particle-in-cell/Monte Carlo collisions simulation and finds good quantitative agreement when the assumed length and time scale requirements are met. A second simulation case illustrates that the model remains applicable even when the assumptions are only marginally fulfilled

0 citations0 reviewsNo code linkedOpen access
preprint2016arXiv

The role of ion transport phenomena in memristive double barrier devices

In this work we report on the role of ion transport for the dynamic behavior of a double barrier quantum mechanical Al/Al$_2$O$_3$/Nb$_{\text{x}}$O$_{\text{y}}$/Au memristive device based on numerical simulations in conjunction with experimental measurements. The device consists of an ultra-thin Nb$_{\text{x}}$O$_{\text{y}}$ solid state electrolyte between an Al$_2$O$_3$ tunnel barrier and a semiconductor metal interface at an Au electrode. It is shown that the device provides a number of interesting features for potential applications such as an intrinsic current compliance, a relatively long retention time, and no need for an initialization step. Therefore, it is particularly attractive for applications in highly dense random access memories or neuromorphic mixed signal circuits. However, the underlying physical mechanisms of the resistive switching are still not completely understood yet. To investigate the interplay between the current transport mechanisms and the inner atomistic device structure a lumped element circuit model is consistently coupled with 3D kinetic Monte Carlo model for the ion transport. The simulation results indicate that the drift of charged point defects within the Nb$_{\text{x}}$O$_{\text{y}}$ is the key factor for the resistive switching behavior. It is shown in detail that the diffusion of oxygen modifies the local electronic interface states resulting in a change of the interface properties of the double barrier device.

0 citations0 reviewsNo code linkedOpen access
preprint2015arXiv

A New Hybrid Scheme for Simulations of Highly Collisional RF-Driven Plasmas

This work describes a new 1D hybrid approach for modeling atmospheric pressure discharges featuring complex chemistry. In this approach electrons are described fully kinetically using Particle-In-Cell/Monte-Carlo (PIC/MCC) scheme, whereas the heavy species are modeled within a fluid description. Validity of the popular drift-diffusion approximation is verified against a "full" fluid model accounting for the ion inertia and a fully kinetic PIC/MCC code for ions as well as electrons. The fluid models require knowledge of the momentum exchange frequency and dependence of the ion mobilities on the electric field when the ions are in equilibrium with the latter. To this end an auxiliary Monte-Carlo scheme is constructed. It is demonstrated that the drift-diffusion approximation can overestimate ion transport in simulations of RF-driven discharges with heavy ion species operated in the $γ$ mode at the atmospheric pressure or in all discharge simulations for lower pressures. This can lead to exaggerated plasma densities and incorrect profiles provided by the drift-diffusion models. Therefore, the hybrid code version featuring the full ion fluid model should be favored against the more popular drfit-diffusion model, noting that the suggested numerical scheme for the former model implies only a small additional computational cost.

0 citations0 reviewsNo code linkedOpen access
preprint2015arXiv

Analytic model of the energy distribution function for highly energetic electrons in magnetron plasmas

This paper analyzes a situation which is common for magnetized technical plasmas such as dc magnetron discharges and HiPIMS systems, where secondary electrons enter the plasma after being accelerated in the cathode fall and encounter a nearly uniform bulk. An analytic calculation of the distribution function of hot electrons is presented; these are described as an initially monoenergetic beam that slows down by Coulomb collisions with a Maxwellian distribution of bulk (cold) electrons, and by inelastic collisions with neutrals. Although this analytical solution is based on a steady-state assumption, a comparison of the characteristic time-scales suggests that it may be applicable to a variety of practical time-dependent discharges, and it may be used to introduce kinetic effects into models based on the hypothesis of Maxwellian electrons. The results are verified for parameters appropriate to HiPIMS discharges, by means of time-dependent and fully-kinetic numerical calculations.

0 citations0 reviewsNo code linkedOpen access
preprint2015arXiv

Transport of Sputtered Particles in Capacitive Sputter Sources

The transport of sputtered aluminum inside a multi frequency capacitively coupled plasma chamber is simulated by means of a kinetic test multi-particle approach. A novel consistent set of scattering parameters obtained for a modified variable hard sphere collision model is presented for both argon and aluminum. An angular dependent Thompson energy distribution is fitted to results from Monte Carlo simulations and used for the kinetic simulation of the transport of sputtered aluminum. For the proposed configuration the transport of sputtered particles is characterized under typical process conditions at a gas pressure of p=0.5 Pa. It is found that -- due to the peculiar geometric conditions -- the transport can be understood in a one dimensional picture, governed by the interaction of the imposed and backscattered particle fluxes. It is shown that the precise geometric features play an important role only in proximity to the electrode edges, where the effect of backscattering from the outside chamber volume becomes the governing mechanism.

0 citations0 reviewsNo code linkedOpen access
preprint2014arXiv

Continuum and Kinetic Simulations of the Neutral Gas Flow in an Industrial Physical Vapor Deposition Reactor

Magnetron sputtering used for physical vapor deposition processes often requires gas pressures well below 1 Pa. Under these conditions the gas flow in the reactor is usually determined by a Knudsen number of about one, i.e., a transition regime between the hydrodynamic and the rarefied gas regime. In the first, the gas flow is well described by the Navier-Stokes equations, while in the second a kinetic approach via the Boltzmann equation is necessary. In this paper the neutral gas flow of argon and molecular nitrogen gas inside an industrial scale plasma reactor was simulated using both a fluid model and a fully kinetic Direct Simulation Monte Carlo model. By comparing both model results the validity of the fluid model was checked. Although in both models a Maxwell-Boltzmann energy distribution of the neutral particles is the natural outcome, the results of the gas flow differ significantly. The fluid model description breaks down, due to the inappropriate assumption of a fluid continuum. This is due to exclusion of non-local effects in the multi dimensional velocity space, as well as invalid gas/wall interactions. Only the kinetic model is able to provide an accurate physical description of the gas flow in the transition regime. Our analysis is completed with a brief investigation of different definitions of the local Knudsen number. We conclude that the most decisive parameter - the spatial length scale L - has to be very careful chosen in order to obtain a reasonable estimate of the gas flow regime.

0 citations0 reviewsNo code linkedOpen access
preprint2014arXiv

Ion energy distribution functions behind the sheaths of magnetized and non magnetized radio frequency discharges

The effect of a magnetic field on the characteristics of capacitively coupled radio frequency discharges is investigated and found to be substantial. A one-dimensional particle-in-cell simulation shows that geometrically symmetric discharges can be asymmetrized by applying a spatially inhomogeneous magnetic field. This effect is similar to the recently discovered electrical asymmetry effect. Both effects act independently, they can work in the same direction or compensate each other. Also the ion energy distribution functions at the electrodes are strongly affected by the magnetic field, although only indirectly. The field influences not the dynamics of the sheath itself but rather its operating conditions, i.e., the ion flux through it and voltage drop across it. To support this interpretation, the particle-in-cell results are compared with the outcome of the recently proposed ensemble-in-spacetime algorithm. Although that scheme resolves only the sheath and neglects magnetization, it is able to reproduce the ion energy distribution functions with very good accuracy, regardless of whether the discharge is magnetized or not.

0 citations0 reviewsNo code linkedOpen access
preprint2013arXiv

Active plasma resonance spectroscopy: A functional analytic description

The term "Active Plasma Resonance Spectroscopy" refers to a class of diagnostic methods which employ the ability of plasmas to resonate on or near the plasma frequency. The basic idea dates back to the early days of discharge physics: An signal in the GHz range is coupled to the plasma via an electrical probe; the spectral response is recorded, and then evaluated with a mathematical model to obtain information on the electron density and other plasma parameters. In recent years, the concept has found renewed interest as a basis of industry compatible plasma diagnostics. This paper analyzes the diagnostics technique in terms of a general description based on functional analytic (or Hilbert Space) methods which hold for arbitrary probe geometries. It is shown that the response function of the plasma-probe system can be expressed as a matrix element of the resolvent of an appropriately defined dynamical operator. A specialization of the formalism for a symmetric probe desing is given, as well as an interpreation in terms of a lumped circuit model consisting of series resonators. We present ideas for an optimized probe design based on geometric and electrical symmetry.

0 citations0 reviewsNo code linkedOpen access
preprint2012arXiv

Simulations of electromagnetic effects in high frequency capacitively coupled discharges using the Darwin approximation

The Darwin approximation is investigated for its possible use in simulation of electromagnetic effects in large size, high frequency capacitively coupled discharges. The approximation is utilized within the framework of two different fluid models which are applied to typical cases showing pronounced standing wave and skin effects. With the first model it is demonstrated that Darwin approximation is valid for treatment of such effects in the range of parameters under consideration. The second approach, a reduced nonlinear Darwin approximation-based model, shows that the electromagnetic phenomena persist in a more realistic setting. The Darwin approximation offers a simple and efficient way of carrying out electromagnetic simulations as it removes the Courant condition plaguing explicit electromagnetic algorithms and can be implemented as a straightforward modification of electrostatic algorithms. The algorithm described here avoids iterative schemes needed for the divergence cleaning and represents a fast and efficient solver, which can be used in fluid and kinetic models for self-consistent description of technical plasmas exhibiting certain electromagnetic activity.

0 citations0 reviewsNo code linkedOpen access
preprint2011arXiv

Fine-sorting One-dimensional Particle-In-Cell Algorithm with Monte-Carlo Collisions on a Graphics Processing Unit

Particle-in-cell (PIC) simulations with Monte-Carlo collisions are used in plasma science to explore a variety of kinetic effects. One major problem is the long run-time of such simulations. Even on modern computer systems, PIC codes take a considerable amount of time for convergence. Most of the computations can be massively parallelized, since particles behave independently of each other within one time step. Current graphics processing units (GPUs) offer an attractive means for execution of the parallelized code. In this contribution we show a one-dimensional PIC code running on Nvidia GPUs using the CUDA environment. A distinctive feature of the code is that size of the cells that the code uses to sort the particles with respect to their coordinates is comparable to size of the grid cells used for discretization of the electric field. Hence, we call the corresponding algorithm "fine-sorting". Implementation details and optimization of the code are discussed and the speed-up compared to classical CPU approaches is computed.

0 citations0 reviewsNo code linkedOpen access
preprint2011arXiv

Ionization wave propagation on a micro cavity plasma array

Microcavity plasma arrays of inverse pyramidal cavities have been fabricated in p-Si wafers. Each cavity acts as a microscopic dielectric barrier discharge. Operated at atmospheric pressure in argon and excited with high voltage at about 10 kHz, each cavity develops a localized microplasma. Experiments have shown a strong interaction of individual cavities, leading to the propagation of wave-like optical emission structures along the surface of the array. This phenomenon is numerically investigated using computer simulation. The observed ionization wave propagates with a speed of about 5 km/s, which agrees well the experimental findings. It is found that the wave propagation is due to sequential contributions of a drift of electrons followed by drift of ions between cavities seeded by photoemission of electrons by the plasma in adjacent cavities.

0 citations0 reviewsNo code linkedOpen access
preprint2011arXiv

Modeling and simulation of ion energy distribution functions in technological plasmas

The highly advanced treatment of surfaces as etching and deposition is mainly enabled by the extraordinary properties of technological plasmas. The primary factors that influence these processes are the flux and the energy of various species, particularly ions, that impinge the substrate surface. These features can be theoretically described using the ion energy distribution function (IEDF). The article is intended to summarize the fundamental concepts of modeling and simulation of IEDFs from simplified models to self-consistent plasma simulations. Finally, concepts for controlling the IEDF are discussed.

0 citations0 reviewsNo code linkedOpen access
preprint2011arXiv

Numerical study of secondary electron emission in a coaxial radio-frequency driven plasma jet at atmospheric pressure

In this work we investigate a numerical model of a coaxial RF-driven plasma jet operated at atmospheric pressure. Due to the cylindrical symmetry an adequate 2-D representation of the otherwise 3-dimensional structure is used. A helium-oxygen chemistry reaction scheme is applied. We study the effect of secondary electrons emitted at the inner electrode as well as the inserted dielectric tube and discuss their impact on the discharge behavior. We conclude that a proper choice of materials can improve the desired mode of operation of such plasma jets in terms of materials and surface processing.

0 citations0 reviewsNo code linkedOpen access
preprint2011arXiv

Self-pulsing of a micro thin cathode discharge

Microplasmas operated at atmospheric pressure show a number of peculiar dynamic phenomena. One of these phenomena is self-pulsing, which is characterized by intrinsic pulsing behavior of a DC driven plasma discharge. This work focuses on the numerical simulation of self-pulsing in a micro thin cathode discharge operated in atmospheric pressure argon. By means of a hybrid plasma model we show self-pulsing of the discharge in the expected MHz frequency range and described its actual origin.

0 citations0 reviewsNo code linkedOpen access
preprint2011arXiv

Spatially resolved simulation of a radio frequency driven micro atmospheric pressure plasma jet and its effluent

Radio frequency driven plasma jets are frequently employed as efficient plasma sources for surface modification and other processes at atmospheric pressure. The radio-frequency driven micro atmospheric pressure plasma jet ($μ$APPJ) is a particular variant of that concept whose geometry allows direct optical access. In this work, the characteristics of the $μ$APPJ operated with a helium-oxygen mixture and its interaction with a helium environment are studied by numerical simulation. The density and temperature of the electrons, as well as the concentration of all reactive species are studied both in the jet itself and in its effluent. It is found that the effluent is essentially free of charge carriers but contains a substantial amount of activated oxygen (O, O$_3$ and O$_2(^1Δ)$). The simulation results are verified by comparison with experimental data.

0 citations0 reviewsNo code linkedOpen access