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Silvan Schmid

Silvan Schmid contributes to research discovery and scholarly infrastructure.

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Published work

14 published item(s)

preprint2022arXiv

Thermal IR detection with nanoelectromechanical silicon nitride trampoline resonators

Nanoelectromechanical (NEMS) resonators are promising uncooled thermal infrared (IR) detectors to overcome existing sensitivity limits. Here, we investigated nanoelectromechanical trampoline resonators made of silicon nitride (SiN) as thermal IR detectors. Trampolines have an enhanced responsivity of more than two orders of magnitude compared to state-of-the-art SiN drums. The characterized NEMS trampoline IR detectors yield a sensitivity in terms of noise equivalent power (NEP) of 7pW/$\sqrt{Hz}$ and a thermal response time as low as 4 ms. The detector area features an impedance-matched metal thin-film absorber with a spectrally flat absorption of 50% over the entire mid-IR spectral range from 1$μm$ to 25$μm$.

preprint2021arXiv

Design Considerations of Gold Nanoantenna Dimers for Plasmomechanical Transduction

Internal optical forces emerging from plasmonic interactions in gold nanodisc, nanocube and nanobar dimers were studied by finite element method. A direct correlation between the electric-field enhancement and optical forces was found by observing largest magnitude of optical forces in nanocube dimers. Moreover, further amplification of optical forces was achieved by employing optical power of the excitation source. The strength of optical forces was observed to be governed by the magnitude of polarisation density on the nanoparticles, which can be varied by modifying the nanoparticle geometry and source wavelength. This study allows us to recognise that nanoparticle geometry along with the inter-dimer distance are the most prominent design considerations for optimising optical forces in plasmonic dimers. The findings facilitate the realisation of all optical modulation in a plasmomechanical nanopillar system, which has promising applications in ultra-sensitive nanomechanical sensing and building reconfigurable metamaterials.

preprint2020arXiv

A nanoelectromechanical position-sensitive detector with picometer resolution

Sub-nanometer displacement detection lays the solid foundation for critical applications in modern metrology. In-plane displacement sensing, however, is mainly dominated by the detection of differential photocurrent signals from photodiodes, with resolution in the nanometer range. Here, we present an integrated in-plane displacement sensor based on a nanoelectromechanical trampoline resonator. With a position resolution of 4 $pm/Hz^{1/2}$ for a low laser power of 85 $μ$W and a repeatability of 2 nm after 5 cycles of operation as well as good long-term stability, this new detection principle provides a reliable alternative for overcoming the current position detection limit in a wide variety of research and application fields.

preprint2020arXiv

Analysis of carbon content in direct-write plasmonic Au structures by nanomechanical scanning absorption microscopy

The determination of the chemical content is crucial for the quality control in high-precision device fabrication and advanced process development. For reliable chemical composition characterization, certain interaction volume of the target material is necessary for conventional techniques such as energy-dispersive X-ray spectroscopy (EDX) and electron energy loss spectroscopy (EELS). This remains however a challenge for nanostructures. We hereby propose an alternative technique for measuring chemical composition of nanostructures with limited volume. By measuring the differences in the optical absorption of the nanostructure due to the differences in the chemical composition with the resonance frequency detuning of a nanomechanical resonator as well as the assistance of the analytical optical modelling, we demonstrate the possibility of characterizing the carbon content in the direct-write focused electron beam induced deposition (FEBID) gold nanostructures.

preprint2020arXiv

Frequency fluctuations in nanomechanical silicon nitride string resonators

High quality factor ($Q$) nanomechanical resonators have received a lot of attention for sensor applications with unprecedented sensitivity. Despite the large interest, few investigations into the frequency stability of high-$Q$ resonators have been reported. Such resonators are characterized by a linewidth significantly smaller than typically employed measurement bandwidths, which is the opposite regime to what is normally considered for sensors. Here, the frequency stability of high-$Q$ silicon nitride string resonators is investigated both in open-loop and closed-loop configurations. The stability is here characterized using the Allan deviation. For open-loop tracking, it is found that the Allan deviation gets separated into two regimes, one limited by the thermomechanical noise of the resonator and the other by the detection noise of the optical transduction system. The point of transition between the two regimes is the resonator response time, which can be shown to have a linear dependence on $Q$. Laser power fluctuations from the optical readout is found to present a fundamental limit to the frequency stability. Finally, for closed-loop measurements, the response time is shown to no longer be intrinsically limited but instead given by the bandwidth of the closed-loop tracking system. Computed Allan deviations based on theory are given as well and found to agree well with the measurements. These results are of importance for the understanding of fundamental limitations of high-$Q$ resonators and their application as high performance sensors.

preprint2020arXiv

Thermal radiation dominated heat transfer in nanomechanical silicon nitride drum resonators

Nanomechanical silicon nitride (SiN) drum resonators are currently employed in various fields of applications that arise from their unprecedented frequency response to physical quantities. In the present study, we investigate the thermal transport in nanomechanical SiN drum resonators by analytical modelling, computational simulations, and experiments for a better understanding of the underlying heat transfer mechanism causing the thermal frequency response. Our analysis indicates that radiative heat loss is a non-negligible heat transfer mechanism in nanomechanical SiN resonators limiting their thermal responsivity and response time. This finding is important for optimal resonator designs for thermal sensing applications as well as cavity optomechanics.

preprint2020arXiv

Thermal transport and frequency response of localized modes on low-stress nanomechanical silicon nitride drums featuring a phononic bandgap structure

Development of broadband thermal sensors for the detection of, among others, radiation, single nanoparticles, or single molecules is of great interest. In recent years, photothermal spectroscopy based on the shift of the resonance frequency of stressed nanomechanical resonators has been successfully demonstrated. Here, we show the application of soft-clamped phononic crystal membranes made of silicon nitride as thermal sensors. It is experimentally demonstrated how a quasi-bandgap remains even at very low tensile stress, in agreement with finite element method simulations. An increase of the relative responsivity of the fundamental defect mode is found when compared to that of uniform square membranes of equal size, with enhancement factors as large as an order of magnitude. We then show phononic crystals engineered inside nanomechanical trampolines, which results in additional reduction of the tensile stress and increased thermal isolation, resulting in further enhancement of the responsivity. Finally, defect mode and bandgap tuning is shown by laser heating of the defect to the point where the fundamental defect mode completely leaves the bandgap.

preprint2020arXiv

Towards nanoelectromechanical photothermal localization microscopy

Single-molecule microscopy has become an indispensable tool for biochemical analysis. The capability of characterizing distinct properties of individual molecules without averaging has provided us with a different perspective for the existing scientific issues and phenomena. Recently, the super-resolution fluorescence microscopy techniques have overcome the optical diffraction limit by the localization of molecule positions. However, the labelling process can potentially modify the intermolecular dynamics. Based on the highly-sensitive nanomechanical photothermal microscopy reported previously, we propose optimizations on this label-free microscopy technique towards localization microscopy. A localization precision of 3 $\unicode{x212B}$ is achieved with gold nanoparticles, and the detection of polarization-dependent absorption is demonstrated, which opens the door for further improvement with polarization modulation imaging.

preprint2019arXiv

Influence of clamp-widening on the quality factor of nanomechanical silicon nitride resonators

Nanomechanical resonators based on strained silicon nitride (Si$_3$N$_4$) have received a large amount of attention in fields such as sensing and quantum optomechanics due to their exceptionally high quality factors ($Q$s). Room-temperature $Q$s approaching 1 billion are now in reach by means of phononic crystals (soft-clamping) and strain engineering. Despite great progress in enhancing $Q$s, difficulties in fabrication of soft-clamped samples limits their implementation into actual devices. An alternative means of achieving ultra-high $Q$s was shown using trampoline resonators with engineered clamps, which serves to localize the stress to the center of the resonator, while minimizing stress at the clamping. The effectiveness of this approach has since come into question from recent studies employing string resonators with clamp-tapering. Here, we investigate this idea using nanomechanical string resonators with engineered clampings similar to those presented for trampolines. Importantly, the effect of orienting the strings diagonally or perpendicularly with respect to the silicon frame is investigated. It is found that increasing the clamp width for diagonal strings slightly increases the $Q$s of the fundamental out-of-plane mode at small radii, while perpendicular strings only deteriorate with increasing clamp width. Measured $Q$s agree well with finite element method simulations even for higher-order resonances. The small increase cannot account for previously reported $Q$s of trampoline resonators. Instead, we propose the effect to be intrinsic and related to surface and radiation losses.

preprint2019arXiv

Spectrally Broadband Electro-Optic Modulation with Nanoelectromechanical String Resonators

In this paper, we present an electro-optical modulator made of two parallel nanoelectromechanical silicon nitride string resonators. These strings are covered with electrically connected gold electrodes and actuated either by Lorentz or electrostatic forces. The in-plane string vibrations modulate thewidth of the gap between the strings. The gold electrodes on both sides of the gap act as a mobile mirror that modulate the laser light that is focused in the middle of this gap. These electro-optical modulators can achieve an optical modulation depth of almost 100% for a driving voltage lower than 1 mV at a frequency of 314 kHz. The frequency range is determined by the string resonance frequency, which can take values of the order of a few hundred kilohertz to several megahertz. The strings are driven in the strongly nonlinear regime, which allows a frequency tuning of several kilohertz without significant effect on the optical modulation depth.

preprint2019arXiv

Ultrathin 2 nm gold as ideal impedance-matched absorber for infrared light

Thermal detectors are a cornerstone of infrared (IR) and terahertz (THz) technology due to their broad spectral range. These detectors call for suitable broad spectral absorbers with minimalthermal mass. Often this is realized by plasmonic absorbers, which ensure a high absorptivity butonly for a narrow spectral band. Alternativly, a common approach is based on impedance-matching the sheet resistance of a thin metallic film to half the free-space impedance. Thereby, it is possible to achieve a wavelength-independent absorptivity of up to 50 %, depending on the dielectric properties of the underlying substrate. However, existing absorber films typicallyrequire a thickness of the order of tens of nanometers, such as titanium nitride (14 nm), whichcan significantly deteriorate the response of a thermal transducers. Here, we present the application of ultrathin gold (2 nm) on top of a 1.2 nm copper oxide seed layer as an effective IR absorber. An almost wavelength-independent and long-time stable absorptivity of 47(3) %, ranging from 2 $μ$m to 20 $μ$m, could be obtained and is further discussed. The presented gold thin-film represents analmost ideal impedance-matched IR absorber that allows a significant improvement of state-of-the-art thermal detector technology.

preprint2013arXiv

Demonstration of suppressed phonon tunneling losses in phononic bandgap shielded membrane resonators for high-Q optomechanics

Dielectric membranes with exceptional mechanical and optical properties present one of the most promising platforms in quantum opto-mechanics. The performance of stressed silicon nitride nanomembranes as mechanical resonators notoriously depends on how their frame is clamped to the sample mount, which in practice usually necessitates delicate, and difficult-to-reproduce mounting solutions. Here, we demonstrate that a phononic bandgap shield integrated in the membrane's silicon frame eliminates this dependence, by suppressing dissipation through phonon tunneling. We dry-etch the membrane's frame so that it assumes the form of a $\mathrm{cm}$-sized bridge featuring a 1-dimensional periodic pattern, whose phononic density of states is tailored to exhibit one, or several, full band gaps around the membrane's high-$Q$ modes in the MHz-range. We quantify the effectiveness of this phononic bandgap shield by optical interferometry measuring both the suppressed transmission of vibrations, as well as the influence of frame clamping conditions on the membrane modes. We find suppressions up to $40~\mathrm{dB}$ and, for three different realized phononic structures, consistently observe significant suppression of the dependence of the membrane's modes on sample clamping - if the mode's frequency lies in the bandgap. As a result, we achieve membrane mode quality factors of $5\times 10^{6}$ with samples that are tightly bolted to the $8~\mathrm{K}$-cold finger of a cryostat. $Q\times f$-products of $6\times 10^{12}~\mathrm{Hz}$ at $300~\mathrm{K}$ and $14\times 10^{12}~\mathrm{Hz}$ at $8~\mathrm{K}$ are observed, satisfying one of the main requirements for optical cooling of mechanical vibrations to their quantum ground-state.

preprint2013arXiv

Graphene on silicon nitride for optoelectromechanical micromembrane resonators

Due to their exceptional mechanical and optical properties, dielectric silicon nitride (SiN) micromembrane resonators have become the centerpiece of many optomechanical experiments. Efficient capacitive coupling of the membrane to an electrical system would facilitate exciting hybrid optoelectromechanical devices. However, capacitive coupling of such dielectric membranes is rather weak. Here we add a single layer of graphene on SiN micromembranes and compare electromechanical coupling and mechanical properties to bare dielectric membranes and to membranes metallized with an aluminium layer. The electrostatic coupling of graphene coated membranes is found to be equal to a perfectly conductive membrane. Our results show that a single layer of graphene substantially enhances the electromechanical capacitive coupling without significantly adding mass, decreasing the superior mechanical quality factor or affecting the optical properties of SiN micromembrane resonators.

preprint2013arXiv

Low-power photothermal probing of single plasmonic nanostructures with nanomechanical string resonators

We demonstrate the direct photothermal probing and mapping of single plasmonic nanostructures via the temperature induced detuning of nanomechanical string resonators. Single Au nanoslits are illuminated with a low-power polarized focused laser beam (λ = 633 nm). Polarization dependent heat generation in gold nanoslits is then imaged with high sensitivity. A sensitivity of -4.1 ppm/nW with respect to the illuminated light (beam diameter 5.0pm0.8 μm) is determined for a single nanoslit (1 μm long and 53 nm wide), which equals to a total light absorption of 16%. This results in a heating of 0.5 K for an illuminance of 8 nW/μm2. Our results show that nanomechanical resonators are a unique and robust analysis tool for the low-power investigation of thermoplasmonic effects in plasmonic hot spots.