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Sébastien Hentz

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cond-mat.mes-hall physics.app-ph physics.ins-det cond-mat.mtrl-sci

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preprint2021arXiv

Amplitude stabilization in a synchronized nonlinear nanomechanical oscillator

In contrast to the well-known phenomenon of frequency stabilization in a synchronized noisy nonlinear oscillator, little is known about its amplitude stability. In this paper, we investigate experimentally and theoretically the amplitude evolution and stability of a nonlinear nanomechanical self-sustained oscillator that is synchronized with an external harmonic drive. We show that the phase difference between the tones plays a critical role on the amplitude level, and we demonstrate that in the strongly nonlinear regime, its amplitude fluctuations are reduced considerably. These findings bring to light a new facet of the synchronization phenomenon, extending its range of applications beyond the field of clock-references and suggesting a new means to enhance oscillator amplitude stability.

preprint2020arXiv

Optomechanical mass spectrometry

It has been demonstrated in the recent years that nanomechanical mass spectrometry was well suited for the analysis of specific high mass species such as viruses. Still, the exclusive use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time (related to capture area) and mass resolution (inversely proportional to device mass). Such devices also require complex readout schemes to simultaneously monitor multiple resonance modes, in particular when stiffness or shape come into play, which degrades mass resolution. These issues restrict nanomechanical MS to the analysis of species with specific properties. We report here the first demonstration of single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanical techniques allows the use of resonators with new topologies. The device introduced here is designed to be impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode. Short analysis time is in reach thanks to the sensitivity and bandwidth of optomechanical read-out and its compliance with telecom multiplexing techniques.

preprint2016arXiv

Frequency fluctuations in silicon nanoresonators

Frequency stability is key to performance of nanoresonators. This stability is thought to reach a limit with the resonator's ability to resolve thermally-induced vibrations. Although measurements and predictions of resonator stability usually disregard fluctuations in the mechanical frequency response, these fluctuations have recently attracted considerable theoretical interest. However, their existence is very difficult to demonstrate experimentally. Here, through a literature review, we show that all studies of frequency stability report values several orders of magnitude larger than the limit imposed by thermomechanical noise. We studied a monocrystalline silicon nanoresonator at room temperature, and found a similar discrepancy. We propose a new method to show this was due to the presence of frequency fluctuations, of unexpected level. The fluctuations were not due to the instrumentation system, or to any other of the known sources investigated. These results challenge our current understanding of frequency fluctuations and call for a change in practices.

preprint2015arXiv

Neutral particle Mass Spectrometry with Nanomechanical Systems

Current approaches to Mass Spectrometry (MS) require ionization of the analytes of interest. For high-mass species, the resulting charge state distribution can be complex and difficult to interpret correctly. In this article, using a setup comprising both conventional time-of-flight MS (TOF-MS) and Nano-Electro-Mechanical-Systems-based MS (NEMS-MS) in situ, we show directly that NEMS-MS analysis is insensitive to charge state: the spectrum consists of a single peak whatever the species charge state, making it significantly clearer than existing MS analysis. In subsequent tests, all charged particles are electrostatically removed from the beam, and unlike TOF-MS, NEMS-MS can still measure masses. This demonstrates the possibility to measure mass spectra for neutral particles. Thus, it is possible to envisage MS-based studies of analytes that are incompatible with current ionization techniques and the way is now open for the development of cutting edge system architectures with unique analytical capability.

preprint2015arXiv

Overcoming limitations of nanomechanical resonators with simultaneous resonances

Dynamic stabilization by simultaneous primary and superharmonic resonances for high order nonlinearity cancellation is demonstrated with an electrostatically-actuated, piezoresistively-transduced nanomechanical resonator. We prove experimentally how the combination of both the third-order nonlinearity cancellation and simultaneous resonances can be used to linearly drive a nanocantilever up to very large amplitudes compared to fundamental limits like pull-in occurrence, opening the way towards resonators with high frequency stability for high-performance sensing or time reference.

preprint2013arXiv

High Frequency top-down Junction-less Silicon Nanowire Resonators

We report here the first realization of top-down silicon nanowires (SiNW) transduced by both junction-less field effect transistor (FET) and the piezoresistive (PZR) effect. The suspended SiNWs are among the smallest top-down SiNWs reported to date, featuring widths down to ~20nm. This has been achieved thanks to a 200mm-wafer-scale, VLSI process fully amenable to monolithic CMOS co-integration. Thanks to the very small dimensions, the conductance of the silicon nanowire can be controlled by a nearby electrostatic gate. Both the junction-less FET and the previously demonstrated PZR transduction have been performed with the same SiNW. These self-transducing schemes have shown similar signal-to-background ratios, and the PZR transduction has exhibited a relatively higher output signal. Allan deviation AD of the same SiNW has been measured with both schemes, and we obtain AD~20ppm for the FET detection and AD~3ppm for the PZR detection at room temperature and low pressure. Orders of magnitude improvements are expected from tighter electrostatic control via changes in geometry and doping level, as well as from CMOS integration. The compact, simple topology of these elementary SiNW resonators opens up new paths towards ultra-dense arrays for gas and mass sensing, time keeping or logic switching systems in SiNW-CMOS platform.

preprint2012arXiv

Comparison of capacitive and frequential readout when scaling accelerometers down from Micro- to Nano- Electro Mechanical Systems

This paper shows the effect of scaling silicon accelerometers down from MEMS to NEMS. It models both electronics and Brownian noise sources for both capacitive and resonant devices, and computes the minimum detectable signal attainable. Computed results are remarkably close to published experimental results. It shows the relatively low influence of the quality factor and of the beam width in the resonant case. Different scaling rules are investigated, and it appears that resonant sensing may satisfy some new application requirements, in particular for critical dimensions below a few hundreds of nm, when it is better resolved than capacitive sensing.