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Researcher profile

Martin Hammerschmidt

Martin Hammerschmidt contributes to research discovery and scholarly infrastructure.

ResearcherAffiliation not importedOpen to collaborate
physics.opticsphysics.comp-phphysics.data-ancond-mat.mes-hallMachine Learningphysics.acc-phphysics.app-ph

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Published work

7 published item(s)

preprint2022arXiv

Computation of eigenfrequency sensitivities using Riesz projections for efficient optimization of nanophotonic resonators

Resonances are omnipresent in physics and essential for the description of wave phenomena. We present an approach for computing eigenfrequency sensitivities of resonances. The theory is based on Riesz projections and the approach can be applied to compute partial derivatives of the complex eigenfrequencies of any resonance problem. Here, the method is derived for Maxwell's equations. Its numerical realization essentially relies on direct differentiation of scattering problems. We use a numerical implementation to demonstrate the performance of the approach compared to differentiation using finite differences. The method is applied for the efficient optimization of the quality factor of a nanophotonic resonator.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Double-Layer Metasurface for Enhanced Photon Up-Conversion

We present a double-layer dielectric metasurface obtained by stacking a silicon nanodisc array and a silicon photonic crystal slab with equal periodicity on top of each other. We focus on the investigation of electric near-field enhancement effects occurring at resonant excitation of the metasurface and study its optical properties numerically and experimentally. We find that the major difference in multi-layer metasurfaces when compared to conventional single-layer structures appears to be in Rayleigh-Wood anomalies: they are split into multiple different modes which are themselves spectrally broadened. As a proof of concept we cover a double-layer metasurface with a lanthanide-doped up-conversion particle layer and study its interaction with a 1550 nm photoexcitation. We observe a 2.7-fold enhancemed up-conversion photoluminescence by using the stacked metasurface instead of a planar substrate, although only around 1% of the up-conversion material is exposed to enhanced near-fields. Two mechanisms are identified explaining this behavior: First, enhanced near-fields when exciting the metasurface resonantly, and second, light trapping by total internal reflection in the particle layer when the metasurface redirects light into high-angle diffraction orders. These results pave the way for low-threshold and, in particular, broadband photon up-conversion in future solar energy and biosensing applications.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Efficient Bayesian inversion for shape reconstruction of lithography masks

Background: Scatterometry is a fast, indirect and non-destructive optical method for quality control in the production of lithography masks. To solve the inverse problem in compliance with the upcoming need for improved accuracy, a computationally expensive forward model has to be defined which maps geometry parameters to diffracted light intensities. Aim: To quantify the uncertainties in the reconstruction of the geometry parameters, a fast to evaluate surrogate for the forward model has to be introduced. Approach: We use a non-intrusive polynomial chaos based approximation of the forward model which increases speed and thus enables the exploration of the posterior through direct Bayesian inference. Additionally, this surrogate allows for a global sensitivity analysis at no additional computational overhead. Results: This approach yields information about the complete distribution of the geometry parameters of a silicon line grating, which in return allows to quantify the reconstruction uncertainties in the form of means, variances and higher order moments of the parameters. Conclusion: The use of a polynomial chaos surrogate allows to quantify both parameter influences and reconstruction uncertainties. This approach is easy to use since no adaptation of the expensive forward model is required.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-angle X-ray scattering (GISAXS) is being considered because measurements are fast with a proven capability to reconstruct average grating line profiles with high accuracy. Aim: GISAXS measurements of grating line shapes should be extended to samples with pitches smaller than 50 nm and their defects. The method's performance should be evaluated. Approach: A series of gratings with 32 nm pitch and deliberately introduced pitchwalk is measured using GISAXS. The grating line profiles with associated uncertainties are reconstructed using a Maxwell solver and Markov-Chain Monte Carlo (MCMC) sampling combined with a simulation library approach. Results: The line shape and the pitchwalk are generally in agreement with previously published transmission small-angle X-ray scattering (SAXS) results; however the line height and line width show deviations of (1.0 +/- 0.2) nm and (2.0 +/- 0.7) nm, respectively. The complex data evaluation leads to relatively high pitchwalk uncertainties between 0.5 nm and 2 nm. Conclusions: GISAXS shows great potential as a metrology tool for small-pitch line gratings with complex line profiles. Faster simulation methods would enable more accurate results.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Quasinormal mode expansion of optical far-field quantities

Quasinormal mode (QNM) expansion is a popular tool to analyze light-matter interaction in nanoresonators. However, expanding far-field quantities such as the energy flux is an open problem because QNMs diverge with an increasing distance to the resonant systems. We introduce a theory to compute modal expansions of far-field quantities rigorously. The presented approach is based on the complex eigenfrequencies of QNMs. The divergence problem is circumvented by using contour integration with an analytical continuation of the far-field quantity into the complex frequency plane. We demonstrate the approach by computing the angular resolved modal energy flux in the far field of a nanophotonic device.

0 citations0 reviewsNo code linkedOpen access
preprint2019arXiv

Nanopatterned Sapphire Substrates in Deep-UV LEDs: Is there an Optical Benefit?

Light emitting diodes (LEDs) in the deep ultra-violet (DUV) offer new perspectives for multiple applications ranging from 3D printing to sterilization. However, insufficient light extraction severely limits their efficiency. Nanostructured sapphire substrates in aluminum nitride based LED devices have recently shown to improve crystal growth properties, while their impact on light extraction has not been fully verified. We present a model for understanding the impact of nanostructures on the light extraction capability of DUV-LEDs. The model assumes an isotropic light source in the semiconductor layer stack and combines rigorously computed scattering matrices with a multilayer solver. We find that the optical benefit of using a nanopatterned as opposed to a planar sapphire substrate to be negligible, if parasitic absorption in the p-side of the LED is dominant. If losses in the p-side are reduced to 20%, then for a wavelength of 265 nm an increase of light extraction efficiency from 7.8% to 25.0% is possible due to nanostructuring. We introduce a concept using a diffuse ('Lambertian') reflector as p-contact, further increasing the light extraction efficiency to 34.2%. The results underline that transparent p-sides and reflective p-contacts in DUV-LEDs are indispensable for enhanced light extraction regardless of the interface texture between semiconductor and sapphire substrate. The optical design guidelines presented in this study will accelerate the development of high-efficiency DUV-LEDs, but the model is also readily applicable to other multilayer opto-electronic nanostructured devices such as photovoltaics or photodetectors.

0 citations0 reviewsNo code linkedOpen access
preprint2019arXiv

Using Gaussian process regression for efficient parameter reconstruction

Optical scatterometry is a method to measure the size and shape of periodic micro- or nanostructures on surfaces. For this purpose the geometry parameters of the structures are obtained by reproducing experimental measurement results through numerical simulations. We compare the performance of Bayesian optimization to different local minimization algorithms for this numerical optimization problem. Bayesian optimization uses Gaussian-process regression to find promising parameter values. We examine how pre-computed simulation results can be used to train the Gaussian process and to accelerate the optimization.

0 citations0 reviewsNo code linkedOpen access