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Guanghui Yuan

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physics.optics

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preprint2020arXiv

Optical Metrology of Sub-Wavelength Objects Enabled by Artificial Intelligence

Microscopes and various forms of interferometers have been used for decades in optical metrology of objects that are typically larger than the wavelength of light λ. However, metrology of subwavelength objects was deemed impossible due to the diffraction limit. We report that measurement of the physical size of sub-wavelength objects with accuracy exceeding λ/800 by analyzing the diffraction pattern of coherent light scattered by the objects with deep learning enabled analysis. With a 633nm laser, we show that the width of sub-wavelength slits in opaque screen can be measured with accuracy of 0.77nm, challenging the accuracy of electron beam and ion beam lithographies. The technique is suitable for high-rate non-contact measurements of nanometric sizes in smart manufacturing applications with integrated metrology and processing tools.

preprint2015arXiv

Optically Reconfigurable Photonic Devices

Optoelectronic components with adjustable parameters, from variable-focal-length lenses to spectral filters that can change functionality upon stimulation, have enormous technological importance. Tuning of such components is conventionally achieved by either micro- or nano-mechanical actuation of their consitutive parts, stretching or application of thermal stimuli. Here we report a new dielectric metasurface platform for reconfigurable optical components that are created with light in a non-volatile and reversible fashion. Such components are written, erased and re-written as two-dimensional binary or grey-scale patterns into a nanoscale film of phase change material by inducing a refractive-index-changing phase-transition with tailored trains of femtosecond pulses. We combine germanium-antimony-tellurium-based films optimized for high-optical-contrast ovonic switching with a sub-wavelength-resolution optical writing process to demonstrate technologically relevant devices: visible-range reconfigurable bi-chromatic and multi-focus Fresnel zone-plates, a super-oscillatory lens with sub-wavelength focus, a grey-scale hologram and a dielectric metamaterial with on-demand reflcetion and transmission resonances.

preprint2014arXiv

Mode-matching metasurfaces: coherent reconstruction and multiplexing of surface waves

Metasurfaces are promising two-dimensional metamaterials that are engineered to provide unique properties or functionalities absent in naturally occurring homogeneous surfaces. Here, we report a type of metasurface for tailored reconstruction of surface plasmon waves from light. The design is generic in a way that one can selectively generate different surface plasmon waves through simple variation of the wavelength or the polarization state of incident light. The ultra-thin metasurface demonstrated in this paper provides a versatile interface between the conventional free-space optics and a two-dimensional platform such as surface plasmonics.