Paper detail

Recent Progress on 3D Silicon Detectors

3D silicon detectors, in which the electrodes penetrate the sensor bulk perpendicular to the surface, have recently undergone a rapid development from R\&D over industrialisation to their first installation in a real high-energy-physics experiment. Since June 2015, the ATLAS Insertable B-Layer is taking first collision data with 3D pixel detectors. At the same time, preparations are advancing to install 3D pixel detectors in forward trackers such as the ATLAS Forward Proton detector or the CMS-TOTEM Proton Precision Spectrometer. For those experiments, the main requirements are a slim edge and the ability to cope with non-uniform irradiation. Both have been shown to be fulfilled by 3D pixel detectors. For the High-Luminosity LHC pixel upgrades of the major experiments, 3D detectors are promising candidates for the innermost pixel layers to cope with harsh radiation environments up to fluences of $2\times10^{16}$\,n$_{eq}$/cm$^2$ thanks to their excellent radiation hardness at low operational voltages and power dissipation as well as moderate temperatures. This paper will give an overview on the recent developments of 3D detectors related to the projects mentioned above and the future plans.