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Potential of the FLASH FEL technology for the construction of a kW-scale light source for the next generation lithography

The driving engine of the Free Electron Laser in Hamburg (FLASH) is an L-band superconducting accelerator. It is designed to operate in burst mode with 800 microsecond pulse duration at a repetition rate of 10 Hz. The maximum accelerated beam current during the macropulse is 9 mA. Our analysis shows that the FLASH technology has great potential since it is possible to construct a FLASH like free electron laser operating at the wavelength of 13.5 and 6.8 nanometer with an average power up to 2.6 kW. Such a source meets the physical requirements for the light source for the next generation lithography.

preprint2011arXivOpen access
E. A. SchneidmillerV. F. VogelH. WeiseM. V. Yurkov
physics.acc-ph
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E. A. SchneidmillerV. F. VogelH. WeiseM. V. Yurkov

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