Abstract

Uniform large transition-edge sensor (TES) arrays are fundamental for the next generation of X-ray space observatories. These arrays are required to achieve an energy resolution ΔEΔE < 3 eV full-width-half-maximum (FWHM) in the soft X-ray energy range. We are currently developing X-ray microcalorimeter arrays for use in future laboratory and space-based X-ray astrophysics experiments and ground-based spectrometers. In this contribution we report on the development and the characterization of a uniform 32×\times32 pixel array with 140×\times30 μμm2^2 Ti/Au TESs with Au X-ray absorber. We report upon extensive measurements on 60 pixels in order to show the uniformity of our large TES array. The averaged critical temperature is TcT_\mathrm{c} = 89.5±\pm0.5 mK and the variation across the array (∼\sim1 cm) is less than 1.5 mK. We found a large region of detector's bias points between 20\% and 40\% of the normal-state resistance where the energy resolution is constantly lower than 3 eV. In particular, results show a summed X-ray spectral resolution ΔEFWHMΔE_\mathrm{FWHM} = 2.50±\pm0.04 eV at a photon energy of 5.9 keV, measured in a single-pixel mode using a frequency domain multiplexing (FDM) readout system developed at SRON/VTT at bias frequencies ranging from 1 to 5 MHz. Moreover we compare the logarithmic resistance sensitivity with respect to temperature and current (αα and ββ respectively) and their correlation with the detector's noise parameter MM, showing an homogeneous behaviour for all the measured pixels in the array.

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