On the difference between breakdown and quench voltages of argon plasma and its relation to 4p−4s4p-4s atomic state transitions

preprint2014arXivOpen access

Abstract

Using a relaxation oscillator circuit, breakdown (VBDV_{\mathrm{BD}}) and quench (VQV_{\mathrm{Q}}) voltages of a DC discharge microplasma between two needle probes are measured. High resolution modified Paschen curves are obtained for argon microplasmas including a quench voltage curve representing the voltage at which the plasma turns off. It is shown that, for a point to point microgap (e.g. the microgap between two needle probes) which describes many realistic microdevices, neither Paschen's law applies nor field emission is noticeable. Although normally VBD>VQV_{\mathrm{BD}}>V_{\mathrm{Q}}, it is observed that depending on environmental parameters of argon, such as pressure and the driving circuitry, plasma can exist in a different state with equal VBDV_{\mathrm{BD}} and VQV_{\mathrm{Q}}. Using emission line spectroscopy, it is shown that VBDV_{\mathrm{BD}} and VQV_{\mathrm{Q}} are equal if the atomic excitation by the electric field dipole moment dominantly leads to one of the argon's metastable states (4P54P_{5} in our study).

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