Abstract
Using a relaxation oscillator circuit, breakdown () and quench () voltages of a DC discharge microplasma between two needle probes are measured. High resolution modified Paschen curves are obtained for argon microplasmas including a quench voltage curve representing the voltage at which the plasma turns off. It is shown that, for a point to point microgap (e.g. the microgap between two needle probes) which describes many realistic microdevices, neither Paschen's law applies nor field emission is noticeable. Although normally , it is observed that depending on environmental parameters of argon, such as pressure and the driving circuitry, plasma can exist in a different state with equal and . Using emission line spectroscopy, it is shown that and are equal if the atomic excitation by the electric field dipole moment dominantly leads to one of the argon's metastable states ( in our study).
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