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Paper detail

Highly reproducible metal/graphene contacts and stable electrical performance by UV-Ozone treatment

Resist residue from the device fabrication process is a general and significant source of the metal/graphene contact interface contamination. In this paper, Ultraviolet-Ozone (UVO) treatment is proven to be an effective way of cleaning the metal/graphene interface. Electrical measurements of devices, which were fabricated by using UVO treatment of the metal/graphene contact region, show that stable and highly reproducible low contact resistance between metal and graphene is obtained without affecting the electrical properties of the graphene channel itself.

preprint2013arXivOpen access
Wei LiChristina A. HackerYiran LiangCurt A. RichterDavid J. GundlachXuelei LiangLianmao Peng
cond-mat.mes-hallcond-mat.mtrl-sci
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Wei LiChristina A. HackerYiran LiangCurt A. RichterDavid J. GundlachXuelei LiangLianmao Peng

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