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Combinatorial Laser Molecular Beam Epitaxy System Integrated with Specialized Low-temperature Scanning Tunneling Microscopy

We present a newly developed facility, comprised of a combinatorial laser molecular beam epitaxy system and an in-situ scanning tunneling microscopy (STM). This facility aims at accelerating the materials research in a highly efficient way, by advanced high-throughput film synthesis techniques and subsequent fast characterization of surface morphology and electronic states. Compared with uniform films deposited by conventional methods, the so-called combinatorial thin films will be beneficial to determining the accurate phase diagrams of different materials due to the improved control of parameters such as chemical substitution and sample thickness resulting from a rotarymask method. A specially designed STM working under low-temperature and ultra-high vacuum conditions is optimized for the characterization of combinatorial thin films, in an XY coarse motion range of 15 mm $\times$ 15 mm and with sub-micrometer location precision. The overall configuration as well as some key aspects like sample holder design, scanner head, and sample/tip/target transfer mechanism are described in detail. The performance of the device is demonstrated by synthesizing high-quality superconducting FeSe thin films with gradient thickness, imaging surfaces of highly oriented pyrolytic graphite, Au (111), Bi2Sr2CaCu2O8+δ (BSCCO) and FeSe. In addition, we have also obtained clean noise spectra of tunneling junctions and the superconducting energy gap of BSCCO. The successful manufacturing of such a facility opens a new window for the next generation of equipment designed for experimental materials research.