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Cavity opto-electromechanical system combining strong electrical actuation with ultrasensitive transduction

A cavity opto-electromechanical system is reported which combines the ultrasensitive transduction of cavity optomechanical systems with the electrical actuation of nanoelectromechanical systems. Ultrasensitive mechanical transduction is achieved via opto-mechanical coupling. Electrical gradient forces as large as 0.40 $μ$N are realized, facilitating strong actuation with ultralow dissipation. A scanning probe microscope is implemented, capable of characterizing the mechanical modes. The integration of electrical actuation into optomechanical devices is an enabling step towards the regime of quantum nonlinear dynamics, and provides new capabilities for quantum control of mechanical motion.