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Paper detail

Beam power scale-up in MEMS based multi-beam ion accelerators

We report on the development of multi-beam RF linear ion accelerators that are formed from stacks of low cost wafers and describe the status of beam power scale-up using an array of 120 beams. The total argon ion current extracted from the 120-beamlet extraction column was 0.5 mA. The measured energy gain in each RF gap reached as high as 7.25 keV. We present a path of using this technology to achieve ion currents >1 mA and ion energies >100 keV for applications in materials processing.

preprint2021arXivOpen access
Q. JiK. K. AfridiT. BauerG. GiesbrechtY. HouA. LalD. NiA. PersaudZ. QinP. SeidlS. SinhaT. Schenkel
physics.acc-ph
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Q. JiK. K. AfridiT. BauerG. GiesbrechtY. HouA. LalD. NiA. PersaudZ. QinP. SeidlS. SinhaT. Schenkel

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