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Adiabatic embedment of nanomechanical resonators in photonic microring cavities

We report a circuit cavity optomechanical system in which a nanomechanical resonator is adiabatically embedded inside an optical ring resonator with ultralow transition loss. The nanomechanical device forms part of the top layer of a horizontal silicon slot ring resonator, which enables dispersive coupling to the dielectric substrate via a tapered nanogap. Our measurements show nearly uncompromised optical quality factors (Q) after the release of the mechanical beam.

preprint2014arXivOpen access
Chi XiongWolfram PerniceMo LiMichael RooksHong X. Tang
cond-mat.mes-hallphysics.optics
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Chi XiongWolfram PerniceMo LiMichael RooksHong X. Tang

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