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A superhigh-frequency optoelectromechanical system based on a slotted photonic crystal cavity

We develop an all-integrated optoelectromechanical system that operates in the superhigh frequency band. This system is based on an ultrahigh-Q slotted photonic crystal (PhC) nanocavity formed by two PhC membranes, one of which is patterned with electrode and capacitively driven. The strong simultaneous electromechanical and optomechanical interactions yield efficient electrical excitation and sensitive optical transduction of the bulk acoustic modes of the PhC membrane. These modes are identified up to a frequency of 4.20 GHz, with their mechanical Q factors ranging from 240 to 1,730. Directly linking signals in microwave and optical domains, such optoelectromechanical systems will find applications in microwave photonics in addition to those that utilize the electromechanical and optomechanical interactions separately.