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Uwe Scheithauer
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Uwe Scheithauer10 visible / 10 total nodes / 9 links

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AuthorshipAuthorshipAuthorshipAuthorshipAuthorshipAuthorshipAuthorshipAuthorshipAuthorshipUwe ScheithauerAUwe ScheithauerResearcherAES Analysis of Al Bond Pads in Electrically Insulating Surroundings Utilizing Metal Grid ContactingWAES Analysis of Al Bond...preprint / 2022Depth resolution optimized sputter depth profiling of a polycrystalline Al layerWDepth resolution optimi...preprint / 2021Sputter-Induced Cross-Contaminations in Analytical AES and XPS Instrumentation: Utilization of the effect for the In-situ Deposition of Ultrathin Functional LayersWSputter-Induced Cross-C...preprint / 2013Application of the analytical methods REM/EDX, AES and SNMS to a chlorine induced aluminium corrosionWApplication of the anal...preprint / 2015Examples for the improvements in AES Depth Profiling of Multilayer Thin Film Systems by Application of Factor Analysis Data EvaluationWExamples for the improv...preprint / 2015Long Time Stability of the Energy Scale Calibration of a Quantum 2000WLong Time Stability of ...preprint / 2015Reducing the Aspect Ratio of Contact Holes by In-Situ Low-Angle Cross SectioningWReducing the Aspect Rat...preprint / 2015In-Situ Low-Angle Cross Sectioning: Bevel Slope Flattening due to Self-Alignment EffectsWIn-Situ Low-Angle Cross...preprint / 2015Vacuum Quality Monitoring of Analytical Sputter Depth Profile Equipment by Recontamination Measurements of a Sputtered Ti SurfaceWVacuum Quality Monitori...preprint / 2017
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Uwe Scheithauer

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PaperAES Analysis of Al Bond Pads in Electrically Insulating Surroundings Utilizing Metal Grid ContactingAuthorship / preprint / 2022PaperDepth resolution optimized sputter depth profiling of a polycrystalline Al layerAuthorship / preprint / 2021PaperSputter-Induced Cross-Contaminations in Analytical AES and XPS Instrumentation: Utilization of the effect for the In-situ Deposition of Ultrathin Functional LayersAuthorship / preprint / 2013PaperApplication of the analytical methods REM/EDX, AES and SNMS to a chlorine induced aluminium corrosionAuthorship / preprint / 2015PaperExamples for the improvements in AES Depth Profiling of Multilayer Thin Film Systems by Application of Factor Analysis Data EvaluationAuthorship / preprint / 2015PaperLong Time Stability of the Energy Scale Calibration of a Quantum 2000Authorship / preprint / 2015PaperReducing the Aspect Ratio of Contact Holes by In-Situ Low-Angle Cross SectioningAuthorship / preprint / 2015PaperIn-Situ Low-Angle Cross Sectioning: Bevel Slope Flattening due to Self-Alignment EffectsAuthorship / preprint / 2015

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