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O Yakushev
Researcher
PaperDischarge-produced plasma extreme ultraviolet (EUV) source and ultra high vacuum chamber for studying EUV-induced processesAuthorship / preprint / 2014PaperCharacterization of carbon contamination under ion and hot atom bombardment in a tin-plasma extreme ultraviolet light sourceAuthorship / preprint / 2014PaperComparison of H2 and He carbon cleaning mechanisms in extreme ultraviolet induced and surface wave discharge plasmasAuthorship / preprint / 2013