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Jan Benedikt
Researcher
PaperDeposition of SiOx films by means of atmospheric pressure microplasma jetsAuthorship / preprint / 2011PaperDiagnostics of low and atmospheric pressure plasmas by means of mass spectrometryAuthorship / preprint / 2011PaperMulti-diagnostic approach to energy transport in an atmospheric pressure helium-oxygen plasma jetAuthorship / preprint / 2021PaperThe mystery of O and O3 production in the effluent of a He/O2 atmospheric pressure microplasma jetAuthorship / preprint / 2011PaperTime resolved measurement of film growth during reactive high power pulsed magnetron sputtering (HIPIMS) of titanium nitrideAuthorship / preprint / 2013PaperParticle beam experiments for the investigation of plasma-surface interactions: application to magnetron sputtering and polymer treatmentAuthorship / preprint / 2013PaperThe role of VUV radiation in the inactivation of bacteria with an atmospheric pressure plasma jetAuthorship / preprint / 2011