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F. Scholze
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F. Scholze4 visible / 4 total nodes / 3 links

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AuthorshipAuthorshipAuthorshipF. ScholzeAF. ScholzeResearcherAnalytical modeling and 3D finite element simulation of line edge roughness in scatterometryWAnalytical modeling and...preprint / 2012Metrology of EUV Masks by EUV-Scatterometry and Finite Element AnalysisWMetrology of EUV Masks ...preprint / 2010Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical SimulationsWInvestigation of 3D Pat...preprint / 2011
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F. Scholze

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PaperAnalytical modeling and 3D finite element simulation of line edge roughness in scatterometryAuthorship / preprint / 2012PaperMetrology of EUV Masks by EUV-Scatterometry and Finite Element AnalysisAuthorship / preprint / 2010PaperInvestigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical SimulationsAuthorship / preprint / 2011

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