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Anders Hallén
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AuthorshipAuthorshipAnders HallénAAnders HallénResearcherUltra-thin film and interface analysis of high-k dielectric materials employing Time-Of-Flight Medium Energy Ion Scattering (TOF-MEIS)WUltra-thin film and int...preprint / 2013Deposition of Ga2O3 thin films by liquid metal target sputteringWDeposition of Ga2O3 thi...preprint / 2023
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Anders Hallén

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