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Wijnand Broer

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cond-mat.mes-hall quant-ph nlin.CD physics.class-ph

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preprint2015arXiv

Nonlinear actuation dynamics of driven Casimir oscillators with rough surfaces

At separations below 100 nm, Casimir-Lifshitz forces strongly influence the actuation dynamics of micro-electromechanical systems (MEMS) in dry vacuum conditions. For a micron size plate oscillating near a surface, which mimics a frequently used setup in experiments with MEMS, we show that the roughness of the surfaces significantly influences the qualitative dynamics of the oscillator. Via a combination of analytical and numerical methods, it is shown that surface roughness leads to a clear increase of initial conditions associated with chaotic motion, that eventually lead to stiction between the surfaces. Since stiction leads to malfunction of MEMS oscillators, our results are of central interest for the design of microdevices. Moreover, they are of significance for fundamentally motivated experiments performed with MEMS.

preprint2013arXiv

Significance of the Casimir force and surface roughness for actuation dynamics of MEMS

Using the measured optical response and surface roughness topography as inputs, we perform realistic calculations of the combined effect of Casimir and electrostatic forces on the actuation dynamics of micro-electromechanical systems (MEMS). In contrast with the expectations, roughness can influence MEMS dynamics even at distances between bodies significantly larger than the root-mean-square roughness. This effect is associated with statistically rare high asperities that can be locally close to the point of contact. It is found that, even though surface roughness appears to have a detrimental effect on the availability of stable equilibria, it ensures that those equilibria can be reached more easily than in the case of flat surfaces. Hence our findings play a principal role for the stability of microdevices such as vibration sensors, switches, and other related MEM architectures operating at distances below 100 nm.

preprint2012arXiv

Roughness correction to the Casimir force at short separations: Contact distance and extreme value statistics

So far there has been no reliable method to calculate the Casimir force at separations comparable to the root-mean-square of the height fluctuations of the surfaces. Statistical analysis of rough gold samples has revealed the presence of peaks considerably higher than the root-mean-square roughness. These peaks redefine the minimum separation distance between the bodies and can be described by extreme value statistics. Here we show that the contribution of the high peaks to the Casimir force can be calculated with a pairwise additive summation, while the contribution of asperities with normal height can be evaluated perturbatively. This method provides a reliable estimate of the Casimir force at short distances, and it solves the significant, so far unexplained discrepancy between measurements of the Casimir force between rough surfaces and the results of perturbation theory. Furthermore, we illustrate the importance of our results in a technologically relevant situation.

preprint2011arXiv

Roughness correction to the Casimir force beyond perturbation theory

Up to now there has been no reliable method to calculate the Casimir force when surface roughness becomes comparable with the separation between bodies. Statistical analysis of rough Au films demonstrates rare peaks with heights considerably larger than the root-mean-square (rms) roughness. These peaks define the minimal distance between rough surfaces and can be described with extreme value statistics. We show that the contributions of high peaks to the force can be calculated independently of each other while the contribution of normal roughness can be evaluated perturbatively beyond the proximity force approximation. The developed method allows a reliable force estimation for short separations. Our model explains the strong hitherto unexplained deviation from the normal Casimir scaling observed experimentally at short separations.