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S. Burger

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Published work

29 published item(s)

preprint2021arXiv

Towards maximally electromagnetically chiral scatterers at optical frequencies

Designing objects with predefined optical properties is a task of fundamental importance for nanophotonics, and chirality is a prototypical example of such a property, with applications ranging from photochemistry to nonlinear photonics. A measure of electromagnetic chirality with a well-defined upper bound has recently been proposed. Here, we optimize the shape of silver helices at discrete frequencies ranging from the far infrared to the optical band. Gaussian process optimization, taking into account also shape derivative information of the helices scattering response, is used to maximize the electromagnetic chirality. We show that the theoretical designs achieve more than 90 percent of the upper bound of em-chirality for wavelenghts \SI{3}{\micro\meter} or larger, while their performance decreases towards the optical band. We fabricate and characterize helices for operation at \SI{800}{\nano\meter}, and identify some of the imperfections that affect the performance. Our work motivates further research both on the theoretical and fabrication sides to unlock potential applications of objects with large electromagnetic chirality at optical frequencies, such as helicity filtering glasses. We show that, at \SI{3}{\micro\meter}, a thin slab of randomly oriented helices can absorb 99 percent of the light of one helicity while absorbing only 9 percent of the opposite helicity.

preprint2017arXiv

AWAKE readiness for the study of the seeded self-modulation of a 400\,GeV proton bunch

AWAKE is a proton-driven plasma wakefield acceleration experiment. % We show that the experimental setup briefly described here is ready for systematic study of the seeded self-modulation of the 400\,GeV proton bunch in the 10\,m-long rubidium plasma with density adjustable from 1 to 10$\times10^{14}$\,cm$^{-3}$. % We show that the short laser pulse used for ionization of the rubidium vapor propagates all the way along the column, suggesting full ionization of the vapor. % We show that ionization occurs along the proton bunch, at the laser time and that the plasma that follows affects the proton bunch. %

preprint2016arXiv

hp-finite-elements for simulating electromagnetic fields in optical devices with rough textures

The finite-element method is a preferred numerical method when electromagnetic fields at high accuracy are to be computed in nano-optics design. Here, we demonstrate a finite-element method using hp-adaptivity on tetrahedral meshes for computation of electromagnetic fields in a device with rough textures. The method allows for efficient computations on meshes with strong variations in element sizes. This enables to use precise geometry resolution of the rough textures. Convergence to highly accurate results is observed.

preprint2016arXiv

Indirect Self-Modulation Instability Measurement Concept for the AWAKE Proton Beam

AWAKE, the Advanced Proton-Driven Plasma Wakefield Acceleration Experiment, is a proof-of-principle R&D experiment at CERN using a 400 GeV/c proton beam from the CERN SPS (longitudinal beam size sigma_z = 12 cm) which will be sent into a 10 m long plasma section with a nominal density of approx. 7x10^14 atoms/cm3 (plasma wavelength lambda_p = 1.2mm). In this paper we show that by measuring the time integrated transverse profile of the proton bunch at two locations downstream of the AWAKE plasma, information about the occurrence of the self-modulation instability (SMI) can be inferred. In particular we show that measuring defocused protons with an angle of 1 mrad corresponds to having electric fields in the order of GV/m and fully developed self-modulation of the proton bunch. Additionally, by measuring the defocused beam edge of the self-modulated bunch, information about the growth rate of the instability can be extracted. If hosing instability occurs, it could be detected by measuring a non-uniform defocused beam shape with changing radius. Using a 1 mm thick Chromox scintillation screen for imaging of the self-modulated proton bunch, an edge resolution of 0.6 mm and hence a SMI saturation point resolution of 1.2 m can be achieved.

preprint2015arXiv

hp-finite element method for simulating light scattering from complex 3D structures

Methods for solving Maxwell's equations are integral part of optical metrology and computational lithography setups. Applications require accurate geometrical resolution, high numerical accuracy and/or low computation times. We present a finite-element based electromagnetic field solver relying on unstructured 3D meshes and adaptive hp-refinement. We apply the method for simulating light scattering off arrays of high aspect-ratio nano-posts and FinFETs.

preprint2013arXiv

Advanced finite-element methods for design and analysis of nanooptical structures: Applications

An overview on recent applications of the finite-element method Maxwell-solver JCMsuite to simulation tasks in nanooptics is given. Numerical achievements in the fields of optical metamaterials, plasmonics, photonic crystal fibers, light emitting devices, solar cells, optical lithography, optical metrology, integrated optics, and photonic crystals are summarized.

preprint2013arXiv

Fast simulation method for parameter reconstruction in optical metrology

A method for automatic computation of parameter derivatives of numerically computed light scattering signals is demonstrated. The finite-element based method is validated in a numerical convergence study, and it is applied to investigate the sensitivity of a scatterometric setup with respect to geometrical parameters of the scattering target. The method can significantly improve numerical performance of design optimization, parameter reconstruction, sensitivity analysis, and other applications.

preprint2013arXiv

Numerical analysis of nanostructures for enhanced light extraction from OLEDs

Nanostructures, like periodic arrays of scatters or low-index gratings, are used to improve the light outcoupling from organic light-emitting diodes (OLED). In order to optimize geometrical and material properties of such structures, simulations of the outcoupling process are very helpful. The finite element method is best suited for an accurate discretization of the geometry and the singular-like field profile within the structured layer and the emitting layer. However, a finite element simulation of the overall OLED stack is often beyond available computer resources. The main focus of this paper is the simulation of a single dipole source embedded into a twofold infinitely periodic OLED structure. To overcome the numerical burden we apply the Floquet transform, so that the computational domain reduces to the unit cell. The relevant outcoupling data are then gained by inverse Flouqet transforming. This step requires a careful numerical treatment as reported in this paper.

preprint2012arXiv

Analytical modeling and 3D finite element simulation of line edge roughness in scatterometry

The influence of edge roughness in angle resolved scatterometry at periodically structured surfaces is investigated. A good description of the radiation interaction with structured surfaces is crucial for the understanding of optical imaging processes like, e.g. in photolithography. We compared an analytical 2D model and a numerical 3D simulation with respect to the characterization of 2D diffraction of a line grating involving structure roughness. The results show a remarkably high agreement. The diffraction intensities of a rough structure can therefore be estimated using the numerical simulation result of an undisturbed structure and an analytically derived correction function. This work allows to improve scatterometric results for the case of practically relevant 2D structures.

preprint2012arXiv

Reconstruction of the wavefunctions of coupled nanoscopic emitters using a coherent optical technique

We show that using coherent, spatially resolved spectroscopy, complex hybrid wave functions can be disentangled into the individual wave functions of the individual emitters. This way, detailed information on the coupling of the individual emitters, not available in far-field spectroscopy can be obtained. The proposed quantum state tomography relies on the ability to selectively excite each emitter individually by spatially localized pulses. Simulations of coupled semiconductor Ga/InAs quantum dots, using light fields available in current nanoplasmonics, show that even undesired resonances can be removed from measured spectra. The method can also be applied to study the internal coupling of pigments in photosythesis and artificial light harvesting.

preprint2011arXiv

Investigation of 3D Patterns on EUV Masks by Means of Scatterometry and Comparison to Numerical Simulations

EUV scatterometry is performed on 3D patterns on EUV lithography masks. Numerical simulations of the experimental setup are performed using a rigorous Maxwell solver. Mask geometry is determined by minimizing the difference between experimental results and numerical results for varied geometrical input parameters for the simulations.

preprint2010arXiv

Finite element method for accurate 3D simulation of plasmonic waveguides

Optical properties of hybrid plasmonic waveguides and of low-Q cavities, formed by waveguides of finite length are investigated numerically. These structures are of interest as building-blocks of plasmon lasers. We use a time-harmonic finite-element package including a propagation-mode solver, a resonance-mode solver and a scattering solver for studying various properties of the system. Numerical convergence of all used methods is demonstrated.

preprint2010arXiv

Finite Element Simulation of the Optical Modes of Semiconductor Lasers

In the present article we investigate optical near fields in semiconductor lasers. We perform finite element simulations for two different laser types, namely a super large optical waveguide (SLOW) laser, which is an edge emitter, and a vertical cavity surface emitting laser (VCSEL). We give the mathematical formulation of the different eigenvalue problems that arise for our examples and explain their numerical solution with the finite element method. Thereby, we also comment on the usage of transparent boundary conditions, which have to be applied to respect the exterior environment, e.g., the very large substrate and surrounding air. For the SLOW laser we compare the computed near fields to experimental data for different design parameters of the device. For the VCSEL example a comparison to simplified 1D mode calculations is carried out.

preprint2010arXiv

Metrology of EUV Masks by EUV-Scatterometry and Finite Element Analysis

Extreme ultraviolet (EUV) lithography is seen as a main candidate for production of future generation computer technology. Due to the short wavelength of EUV light (around 13 nm) novel reflective masks have to be used in the production process. A prerequisite to meet the high quality requirements for these EUV masks is a simple and accurate method for absorber pattern profile characterization. In our previous work we demonstrated that the Finite Element Method (FEM) is very well suited for the simulation of EUV scatterometry and can be used to reconstruct EUV mask profiles from experimental scatterometric data. In this contribution we apply an indirect metrology method to periodic EUV line masks with different critical dimensions (140 nm and 540 nm) over a large range of duty cycles (1:2, ..., 1:20). We quantitatively compare the reconstructed absorber pattern parameters to values obtained from direct AFM and CD-SEM measurements. We analyze the reliability of the reconstruction for the given experimental data. For the CD of the absorber lines, the comparison shows agreement of the order of 1nm. Furthermore we discuss special numerical techniques like domain decomposition algorithms and high order finite elements and their importance for fast and accurate solution of the inverse problem.

preprint2010arXiv

Numerical Investigation of Photonic Crystal Microcavities in Silicon-on-Insulator Waveguides

Optical resonances in 1D photonic crystal microcavities are investigated numerically using finite-element light scattering and eigenmode solvers. The results are validated by comparison to experimental and theoretical findings from the literature. The influence of nanometer-scale geometry variations on the resonator performance is studied. Limiting factors to ultra-high Q-factor performance are identified.

preprint2010arXiv

Reduced basis method for computational lithography

A bottleneck for computational lithography and optical metrology are long computational times for near field simulations. For design, optimization, and inverse scatterometry usually the same basic layout has to be simulated multiple times for different values of geometrical parameters. The reduced basis method allows to split up the solution process of a parameterized model into an expensive offline and a cheap online part. After constructing the reduced basis offline, the reduced model can be solved online very fast in the order of seconds or below. Error estimators assure the reliability of the reduced basis solution and are used for self adaptive construction of the reduced system. We explain the idea of reduced basis and use the finite element solver JCMsuite constructing the reduced basis system. We present a 3D optimization application from optical proximity correction (OPC).

preprint2010arXiv

Reduced basis method for source mask optimization

Image modeling and simulation are critical to extending the limits of leading edge lithography technologies used for IC making. Simultaneous source mask optimization (SMO) has become an important objective in the field of computational lithography. SMO is considered essential to extending immersion lithography beyond the 45nm node. However, SMO is computationally extremely challenging and time-consuming. The key challenges are due to run time vs. accuracy tradeoffs of the imaging models used for the computational lithography. We present a new technique to be incorporated in the SMO flow. This new approach is based on the reduced basis method (RBM) applied to the simulation of light transmission through the lithography masks. It provides a rigorous approximation to the exact lithographical problem, based on fully vectorial Maxwell's equations. Using the reduced basis method, the optimization process is divided into an offline and an online steps. In the offline step, a RBM model with variable geometrical parameters is built self-adaptively and using a Finite Element (FEM) based solver. In the online step, the RBM model can be solved very fast for arbitrary illumination and geometrical parameters, such as dimensions of OPC features, line widths, etc. This approach dramatically reduces computational costs of the optimization procedure while providing accuracy superior to the approaches involving simplified mask models. RBM furthermore provides rigorous error estimators, which assure the quality and reliability of the reduced basis solutions. We apply the reduced basis method to a 3D SMO example. We quantify performance, computational costs and accuracy of our method.

preprint2003arXiv

Spectroscopy of Dark Soliton States in Bose-Einstein Condensates

Experimental and numerical studies of the velocity field of dark solitons in Bose-Einstein condensates are presented. The formation process after phase imprinting as well as the propagation of the emerging soliton are investigated using spatially resolved Bragg-spectroscopy of soliton states in Bose-Einstein condensates of Rubidium87. A comparison of experimental data to results from numerical simulations of the Gross-Pitaevskii equation clearly identifies the flux underlying a dark soliton propagating in a Bose-Einstein condensate. The results allow further optimization of the phase imprinting method for creating collective exitations of Bose-Einstein condensates.

preprint2002arXiv

Dynamics of a Bose-Einstein condensate at finite temperature in an atomoptical coherence filter

The macroscopic coherent tunneling through the barriers of a periodic potential is used as an atomoptical filter to separate the condensate and the thermal components of a $^{87}$Rb mixed cloud. We condense in the combined potential of a laser standing-wave superimposed on the axis of a cigar-shape magnetic trap and induce condensate dipole oscillation in the presence of a static thermal component. The oscillation is damped due to interaction with the thermal fraction and we investigate the role played by the periodic potential in the damping process.

preprint2001arXiv

Bose-Einstein Condensates in a 1D Optical Lattice

We give an overview on current experiments on Bose-Einstein condensation (BEC) in a one-dimensional (1D) optical lattice. We introduce measurements of ground state, tunnelling and dynamical properties as well as investigations of atom optical applications and thermodynamical properties. Measurements of the coherent atomic current in an array of Josephson junctions and the critical velocity for the breakdown of superfluid motion are discussed in detail.

preprint2001arXiv

Expansion of a coherent array of Bose-Einstein condensates

We investigate the properties of a coherent array containing about 200 Bose-Einstein condensates produced in a far detuned 1D optical lattice. The density profile of the gas, imaged after releasing the trap, provides information about the coherence of the ground-state wavefunction. The measured atomic distribution is characterized by interference peaks. The time evolution of the peaks, their relative population as well as the radial size of the expanding cloud are in good agreement with the predictions of theory. The 2D nature of the trapped condensates and the conditions required to observe the effects of coherence are also discussed.

preprint2000arXiv

A Waveguide for Bose-Einstein Condensates

We report on the creation of Bose-Einstein condensates of $^{87}$Rb in a specially designed hybrid, dipole and magnetic trap. This trap naturally allows the coherent transfer of matter waves into a pure dipole potential waveguide based on a doughnut beam. Specifically, we present studies of the coherence of the ensemble in the hybrid trap and during the evolution in the waveguide by means of an autocorrelation interferometer scheme. By monitoring the expansion of the ensemble in the waveguide we observe a mean field dominated acceleration on a much longer time scale than in the free 3D expansion. Both the autocorrelation interference and the pure expansion measurements are in excellent agreement with theoretical predictions of the ensemble dynamics.