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Morten Hovd

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cond-mat.mtrl-sci eess.SY Systems and Control math.OC

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preprint2021arXiv

Inverse response behaviour in the bright ring radius measurement of the Czochralski process I: Investigation

This is the first part of a two-article series that deals with the investigation of the anomalous behaviour in the radius measurement signal of the Czochralski (Cz) process and its mitigation in a feedback control system. The inverse or anomalous behaviour is indeed a measurement signal response, which initially is opposite to that of the expected response. This is a crucial and limiting factor in feedback control system design. The paper presents the development of a rigorous 3D ray-tracing method to investigate the inverse response behaviour in the measurement signal. The results of this study provide an insight into the dynamic behaviour of the Cz growth process. It can serve as a guideline for achieving effective crystal radius control, which is addressed in the second part of this article series.

preprint2021arXiv

Inverse response behaviour in the bright ring radius measurement of the Czochralski process II: Mitigation by control

This is the second part of a two-article series investigating the presence of an inverse response in the measurement of the ingot radius in the Czochralski process for monocrystalline silicon production, when the ingot radius is deduced from a camera image of the bright ring at the meniscus connecting the solid crystal to the silicon melt. Such inverse responses are known to pose a fundamental limitation in achievable control performance. However, for the bright ring radius measurement, the inverse response is an artefact of the measurement technique and does not appear in the physical variable one wants to control (the actual crystal radius). The present article addresses control for the mitigation of the inverse response behaviour, using a combination of parallel compensation and feedback control. The proposed design is validated against simulations where the production process is subjected to temperature disturbances.

preprint2020arXiv

Simultaneous input & state estimation, singular filtering and stability

Input estimation is a signal processing technique associated with deconvolution of measured signals after filtering through a known dynamic system. Kitanidis and others extended this to the simultaneous estimation of the input signal and the state of the intervening system. This is normally posed as a special least-squares estimation problem with unbiasedness. The approach has application in signal analysis and in control. Despite the connection to optimal estimation, the standard algorithms are not necessarily stable, leading to a number of recent papers which present sufficient conditions for stability. In this paper we complete these stability results in two ways in the time-invariant case: for the square case, where the number of measurements equals the number of unknown inputs, we establish exactly the location of the algorithm poles; for the non-square case, we show that the best sufficient conditions are also necessary. We then draw on our previous results interpreting these algorithms, when stable, as singular Kalman filters to advocate a direct, guaranteed stable implementation via Kalman filtering. This has the advantage of clarity and flexibility in addition to stability. En route, we decipher the existing algorithms in terms of system inversion and successive singular filtering. The stability results are extended to the time-varying case directly to recover the earlier sufficient conditions for stability via the Riccati difference equation.