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Source author record

Halima Zahra Bukhari

Halima Zahra Bukhari appears in the imported research catalog. Authorship, coauthor and topic links are available while profile ownership is still unclaimed.

ResearcherUnclaimed source record
cond-mat.mtrl-scieess.SYSystems and Control

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Published work

2 published item(s)

preprint2021arXiv

Inverse response behaviour in the bright ring radius measurement of the Czochralski process I: Investigation

This is the first part of a two-article series that deals with the investigation of the anomalous behaviour in the radius measurement signal of the Czochralski (Cz) process and its mitigation in a feedback control system. The inverse or anomalous behaviour is indeed a measurement signal response, which initially is opposite to that of the expected response. This is a crucial and limiting factor in feedback control system design. The paper presents the development of a rigorous 3D ray-tracing method to investigate the inverse response behaviour in the measurement signal. The results of this study provide an insight into the dynamic behaviour of the Cz growth process. It can serve as a guideline for achieving effective crystal radius control, which is addressed in the second part of this article series.

0 citations0 reviewsNo code linkedOpen access
preprint2021arXiv

Inverse response behaviour in the bright ring radius measurement of the Czochralski process II: Mitigation by control

This is the second part of a two-article series investigating the presence of an inverse response in the measurement of the ingot radius in the Czochralski process for monocrystalline silicon production, when the ingot radius is deduced from a camera image of the bright ring at the meniscus connecting the solid crystal to the silicon melt. Such inverse responses are known to pose a fundamental limitation in achievable control performance. However, for the bright ring radius measurement, the inverse response is an artefact of the measurement technique and does not appear in the physical variable one wants to control (the actual crystal radius). The present article addresses control for the mitigation of the inverse response behaviour, using a combination of parallel compensation and feedback control. The proposed design is validated against simulations where the production process is subjected to temperature disturbances.

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