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Researcher profile

Michael Krumrey

Michael Krumrey contributes to research discovery and scholarly infrastructure.

ResearcherAffiliation not importedOpen to collaborate
cond-mat.mes-hallphysics.ins-detcond-mat.mtrl-scicond-mat.othercond-mat.softphysics.app-ph

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Published work

6 published item(s)

preprint2022arXiv

Small-Angle X-ray Scattering: Characterization of cubic Au nanoparticles using Debye's scattering formula

We propose a versatile software package in the form of a Python extension, named CDEF (Computing Debye's scattering formula for Extraordinary Formfactors), to approximately calculate scattering profiles of arbitrarily shaped nanoparticles for small-angle X-ray scattering (SAXS). CDEF generates a quasi-randomly distributed point cloud in the desired particle shape and then applies the open source software DEBYER for efficient evaluation of Debye's scattering formula to calculate the SAXS pattern. If self-correlation of the scattering signal is not omitted, the quasi-random distribution provides faster convergence compared to a true random distribution of the scatterers, especially at higher momentum transfer. The usage of the software is demonstrated for the evaluation of scattering data of Au nanocubes with rounded edges, which were measured at the four-crystal monochromator beamline of PTB at the synchrotron radiation facility BESSY II in Berlin. Our implementation is fast enough to run on a single desktop computer and perform model fits within minutes. The accuracy of the method was analyzed by comparison with analytically known form factors and verified with another implementation, the SPONGE, based on a similiar principle with fewer approximations. Additionally, the SPONGE coupled to McSAS3 allows us to further retrieve information on the uncertainty of the size distribution using a Monte-Carlo uncertainty estimation algorithm.

0 citations0 reviewsNo code linkedOpen access
preprint2020arXiv

Extracting Dimensional Parameters of Gratings Produced with Self-Aligned Multiple Patterning Using GISAXS

Background: To ensure consistent and high-quality semiconductor production at future logic nodes, additional metrology tools are needed. For this purpose, grazing-incidence small-angle X-ray scattering (GISAXS) is being considered because measurements are fast with a proven capability to reconstruct average grating line profiles with high accuracy. Aim: GISAXS measurements of grating line shapes should be extended to samples with pitches smaller than 50 nm and their defects. The method's performance should be evaluated. Approach: A series of gratings with 32 nm pitch and deliberately introduced pitchwalk is measured using GISAXS. The grating line profiles with associated uncertainties are reconstructed using a Maxwell solver and Markov-Chain Monte Carlo (MCMC) sampling combined with a simulation library approach. Results: The line shape and the pitchwalk are generally in agreement with previously published transmission small-angle X-ray scattering (SAXS) results; however the line height and line width show deviations of (1.0 +/- 0.2) nm and (2.0 +/- 0.7) nm, respectively. The complex data evaluation leads to relatively high pitchwalk uncertainties between 0.5 nm and 2 nm. Conclusions: GISAXS shows great potential as a metrology tool for small-pitch line gratings with complex line profiles. Faster simulation methods would enable more accurate results.

0 citations0 reviewsNo code linkedOpen access
preprint2014arXiv

Characterization of an in-vacuum PILATUS 1M detector

A dedicated in-vacuum X-ray detector based on the hybrid pixel PILATUS 1M detector has been installed at the four-crystal monochromator beamline of PTB at the electron storage ring BESSY II in Berlin. Due to its windowless operation, the detector can be used in the entire photon energy range of the beamline from 10 keV down to 1.75 keV for small-angle X-ray scattering (SAXS) experiments and anomalous SAXS (ASAXS) at absorption edges of light elements. The radiometric and geometric properties of the detector like quantum efficiency, pixel pitch and module alignment have been determined with low uncertainties. The first grazing incidence SAXS (GISAXS) results demonstrate the superior resolution in momentum transfer achievable at low photon energies.

0 citations0 reviewsNo code linkedOpen access
preprint2014arXiv

Nanoparticle characterization by continuous contrast variation in SAXS with a solvent density gradient

Many low-density nanoparticles show a radial inner structure. This work proposes a novel approach to contrast variation with SAXS based on the constitution of a solvent density gradient in a glass capillary in order to resolve this internal morphology. Scattering curves of a polymeric core-shell colloid were recorded at different suspending medium contrasts at the four-crystal monochromator beamline of PTB at the synchrotron radiation facility BESSY II. The mean size and size distribution of the particles as well as an insight into the colloid electron density composition were determined using the position of the isoscattering points in the Fourier region of the scattering curves and by examining the Guinier region in detail. These results were corroborated with a model fit to the experimental data, which provided complementary information about the inner electron density distribution of the suspended nanoparticles.

0 citations0 reviewsNo code linkedOpen access
preprint2014arXiv

Traceable GISAXS measurements for pitch determination of a 25 nm self-assembled polymer grating

The feature sizes of only a few nanometers in modern nanotechnology and next-generation microelectronics continually increase the demand for suitable nanometrology tools. Grazing incidence small-angle X-ray scattering (GISAXS) is a versatile technique to measure lateral and vertical sizes in the nm-range, but the traceability of the obtained parameters, which is a prerequisite for any metrological measurement, has not been demonstrated so far. In this work, the first traceable GISAXS measurements, demonstrated with a self-assembled block copolymer grating structure with a nominal pitch of 25 nm, are reported. The different uncertainty contributions to the obtained pitch value of 24.83(9) nm are discussed individually. The main uncertainty contribution results from the sample-detector distance and the pixel size measurement, whereas the intrinsic asymmetry of the scattering features is of minor relevance for the investigated grating structure. The uncertainty analysis provides a basis for the evaluation of the uncertainty of GISAXS data in a more general context, for example in numerical data modeling.

0 citations0 reviewsNo code linkedOpen access
preprint2013arXiv

A diffraction effect in X-ray area detectors

When an X-ray area detector based on a single crystalline material, for instance, a state of the art hybrid pixel detector, is illuminated from a point source by monochromatic radiation, a pattern of lines appears which overlays the detected image. These lines can be easily found by scattering experiments with smooth patterns, such as small-angle X-ray scattering. The origin of this effect is the Bragg reflection in the sensor layer of the detector. Experimental images are presented over a photon energy range from 3.4 keV to 10 keV, together with a theoretical analysis. The intensity of this pattern is up to 20%, which can disturb the evaluation of scattering and diffraction experiments. The patterns can be exploited to check the alignment of the detector surface with the direct beam, and the alignment of individual detector modules with each other in the case of modular detectors, as well as for the energy calibration of the radiation.

0 citations0 reviewsNo code linkedOpen access