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Louise Banniard

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physics.app-ph physics.optics

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preprint2021arXiv

Real-time sensing with multiplexed optomechanical resonators

Nanoelectromechanical resonators have been successfully used for a variety of sensing applications. Their extreme resolution comes from their small size at the cost of low capture area, making the "needle in a haystack" issue acute. This leads to poor instrument sensitivity and long analysis time. Moreover, electrical transductions are limited in frequency, which limits the achievable mechanical bandwidth again limiting throughput. Multiplexing a large number of high-frequency resonators appears as a solution, but this is complex with electrical transductions. We propose here a route to solve these issues, with a multiplexing scheme for very high frequency optomechanical resonators. We demonstrate the simultaneous frequency measurement of three silicon microdisks resonators fabricated through a Very Large Scale Integration process. The readout architecture is simple and does not degrade the sensing resolutions. This paves the way towards the realization of sensors for multi-parametric analysis, extremely low limit of detection and response time.

preprint2020arXiv

Optomechanical mass spectrometry

It has been demonstrated in the recent years that nanomechanical mass spectrometry was well suited for the analysis of specific high mass species such as viruses. Still, the exclusive use of one-dimensional devices such as vibrating beams forces a trade-off between analysis time (related to capture area) and mass resolution (inversely proportional to device mass). Such devices also require complex readout schemes to simultaneously monitor multiple resonance modes, in particular when stiffness or shape come into play, which degrades mass resolution. These issues restrict nanomechanical MS to the analysis of species with specific properties. We report here the first demonstration of single-particle mass spectrometry with nano-optomechanical resonators fabricated with a Very Large Scale Integration process. The unique motion sensitivity of optomechanical techniques allows the use of resonators with new topologies. The device introduced here is designed to be impervious to particle position, stiffness or shape, opening the way to the analysis of large aspect ratio biological objects of great significance such as viruses with a tail or fibrils. Compared to top-down beam resonators with electrical read-out and state-of-the-art mass resolution, we show a three-fold improvement in capture area with no resolution degradation, despite the use of a single resonance mode. Short analysis time is in reach thanks to the sensitivity and bandwidth of optomechanical read-out and its compliance with telecom multiplexing techniques.