Carbon dioxide absorption spectroscopy with a mid-infrared silicon photonic waveguide
Carbon dioxide is a vital gas for life on Earth, a waste product of human activities, and widely used in agriculture and industry. Its accurate sensing is therefore of great interest. Optical sensors exploiting the mid-infrared light absorption of CO provide high selectivity, but their large size and high cost limit their use. Here, we demonstrate CO gas sensing at 4.2 m wavelength using an integrated silicon waveguide, featuring a sensitivity to CO of 44 % that of free-space sensing. The suspended waveguide is fabricated on a silicon-on-insulator substrate by a single-lithography-step process, and we route it into a mid-infrared photonic circuit for on-chip-referenced gas measurements. Its demonstrated performance and its simple and scalable fabrication make our waveguide ideal for integration in miniaturized CO sensors for distributed environmental monitoring, personal safety, medical, and high-volume consumer applications.