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Gerard J. Verbiest

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Published work

4 published item(s)

preprint2021arXiv

Self-sealing complex oxide resonators

Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressure sensors to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nano-mechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices for 15 minutes. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. We confirm the enhancement of adhesion by picosecond ultrasonics measurements which show an increase in the interfacial stiffness by 70% after annealing. Since it is straigthforward to apply, the presented self-sealing method is thus a promising route toward realizing ultrathin hermetic pressure sensors.

preprint2020arXiv

Nanoelectromechanical Sensors based on Suspended 2D Materials

The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing.

preprint2019arXiv

Nonequilibrium Thermodynamics of Acoustic Phonons in Suspended Graphene

Recent theory has predicted large temperature differences between the in-plane (LA and TA) and out-of-plane (ZA) acoustic phonon baths in locally-heated suspended graphene. To verify these predictions, and their implications for understanding the nonequilibrium thermodynamics of 2D materials, experimental techniques are needed. Here, we present a method to determine the acoustic phonon bath temperatures from the frequency-dependent mechanical response of suspended graphene to a power modulated laser. The mechanical motion reveals two counteracting contributions to the thermal expansion force, that are attributed to fast positive thermal expansion by the in-plane phonons and slower negative thermal expansion by the out-of-plane phonons. The magnitude of the two forces reveals that the in-plane and flexural acoustic phonons are at very different temperatures in the steady-state, with typically observed values of the ratio $ΔT_{\mathrm{LA+TA}}/ΔT_{\mathrm{ZA}}$ between 0.2 and 3.7. These deviations from the generally used local thermal equilibrium assumption ($ΔT_{\mathrm{LA+TA}}=ΔT_{\mathrm{ZA}}$) can affect the experimental analysis of thermal properties of 2D materials.

preprint2019arXiv

Phonon Scattering at Kinks in Suspended Graphene

Recent experiments have shown surprisingly large thermal time constants in suspended graphene ranging from 10 to 100 ns in drums with a diameter ranging from 2 to 7 microns. The large time constants and their scaling with diameter points towards a thermal resistance at the edge of the drum. However, an explanation of the microscopic origin of this resistance is lacking. Here, we show how phonon scattering at a kink in the graphene, e.g. formed by sidewall adhesion at the edge of the suspended membrane, can cause a large thermal time constant. This kink strongly limits the fraction of flexural phonons that cross the suspended graphene edge, which causes a thermal interface resistance at its boundary. Our model predicts thermal time constants that are of the same order of magnitude as experimental data, and shows a similar dependence on the circumference. Furthermore, the model predicts the relative in-plane and out-of-plane phonon contributions to graphene's thermal expansion force, in agreement with experiments. We thus show, that in contrast to conventional thermal (Kapitza) resistance which occurs between two different materials, in 2D materials another type of thermal interface resistance can be geometrically induced in a single material.