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E. Buks

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Published work

4 published item(s)

preprint2011arXiv

Effects of electron beam induced carbon deposition on the mechanical properties of a micromechanical oscillator

Electron beam induced deposition of amorphous carbon finds several uses in microlithography, surface micromachining, and the manufacturing of micro- and nanomechanical devices. This process also occurs unintentionally in vacuum chambers of electron microscopes and interferes with normal image acquisition by reducing resolution and causing charging effects. In this work, we show that the resonance frequency of a micromechanical oscillator can be significantly affected by exposing it to a focused electron beam, which induces local carbonization on the surface of the oscillator, resulting in increase in the effective stress along the beam. This \emph{in-situ} carbonization can be utilized for analyzing the amount of residual organic contamination in vacuum chambers. In addition, the method described here allows post-fabrication fine tuning of mechanical resonance frequencies of individual oscillating elements.

preprint2011arXiv

Forced and self-excited oscillations of an optomechanical cavity

We experimentally study forced and self oscillations of an optomechanical cavity which is formed between a fiber Bragg grating that serves as a static mirror and between a freely suspended metallic mechanical resonator that serves as a moving mirror. In the domain of small amplitude mechanical oscillations, we find that the optomechanical coupling is manifested as changes in the effective resonance frequency, damping rate and cubic nonlinearity of the mechanical resonator. Moreover, self oscillations of the micromechanical mirror are observed above a certain optical power threshold. A comparison between the experimental results and a theoretical model that we have recently presented yields a good agreement. The comparison also indicates that the dominant optomechanical coupling mechanism is the heating of the metallic mirror due to optical absorption.

preprint2011arXiv

Nonlinear dynamics of a microelectromechanical mirror in an optical resonance cavity

The dynamical behavior of a nonlinear micromechanical resonator acting as one of the mirrors in an optical resonance cavity is investigated. The mechanical motion is coupled to the optical power circulating inside the cavity both directly through the radiation pressure and indirectly through heating that gives rise to a frequency shift in the mechanical resonance and to thermal deformation. The the energy stored in the optical cavity is assumed to follow the mirror displacement without any lag. In contrast, a finite thermal relaxation rate introduces retardation effects into the mechanical equation of motion through temperature dependent terms. Using standard averaging and harmonic balance techniques, slow envelope evolution equations are derived. In the limit of small mechanical vibrations, the micromechanical system can be described as a nonlinear Duffing-like oscillator. Coupling to the optical cavity is shown to introduce corrections to the linear dissipation, the nonlinear dissipation and the nonlinear elastic constants of the micromechanical mirror. The magnitude and the sign of these corrections depend on the exact position of the mirror and on the optical power incident on the cavity. In particular, the effective linear dissipation can become negative, causing self-sustained mechanical oscillations to occur. The full slow envelope evolution equations are used to derive the amplitudes and the corresponding oscillation frequencies of different limit cycles, and the bifurcation behavior is analyzed in detail. Finally, the theoretical results are compared to numerical simulations using realistic values of different physical parameters, showing a very good correspondence.

preprint2006arXiv

Noise Squeezing in a Nanomechanical Duffing Resonator

We study mechanical amplification and noise squeezing in a nonlinear nanomechanical resonator driven by an intense pump near its dynamical bifurcation point, namely, the onset of Duffing bistability. Phase sensitive amplification is achieved by a homodyne detection scheme, where the displacement detector's output, which has correlated spectrum around the pump frequency, is down converted by mixing with a local oscillator operating at the pump frequency with an adjustable phase. The down converted signal at the mixer's output could be either amplified or deamplified, yielding noise squeezing, depending on the local oscillator phase.