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Christopher A. Dirdal

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physics.optics physics.app-ph

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preprint2021arXiv

MEMS-tunable dielectric metasurface lens using thin-film PZT for large displacements at low voltages

Tunable focusing is a desired property in a wide range of optical imaging and sensing technologies but has tended to require bulky components which cannot be integrated on-chip and have slow actuation speeds. Recently, integration of metasurfaces into electrostatic MEMS architectures has shown potential to overcome these challenges, but has offered limited out of plane displacement range while requiring large voltages. We demonstrate for the first time a movable metasurface lens actuated by integrated thin-film PZT MEMS, which has the advantage of offering large displacements at low voltages. An out of plane displacement of a metasurface in the range of 7.2 um is demonstrated under a voltage application of 23V. This is roughly twice the displacement at a quarter of the voltage of state of the art electrostatic out of plane actuation of metasurfaces. Utilizing this tunability we demonstrate a varifocal lens doublet with a focal shift on the order of 250um at the wavelength 1.55um. Thin-film PZT MEMS-metasurfaces is a promising platform for miniaturized varifocal components.

preprint2020arXiv

Towards High Throughput Large Area Metalens Fabrication using UV-Nanoimprint lithography and Bosch Deep Reactive Ion Etching

We demonstrate the fabrication of diffraction-limited dielectric metasurface lenses for NIR by use of standard industrial high throughput silicon processing techniques: UV Nano Imprint Lithography (UV-NIL) combined with continuous Reactive Ion Etching (RIE) and pulsed Bosch Deep Reactive Ion Etching (DRIE). As the research field of metasurfaces moves towards applications these techniques are relevant as potential replacements of commonly used cost-intensive fabrication methods utilizing Electron Beam Lithography. We show that washboard-type sidewall surface roughness arising from the Bosch DRIE process can be compensated for in the design of the metasurface, without deteriorating lens quality. Particular attention is given to fabrication challenges that must be overcome towards high throughput production of relevance to commercial applications. Lens efficiencies are measured to be 30% and 17% at wavelengths λ = 1.55$μ$m and λ = 1.31$μ$m, respectively. A number of routes towards process optimization are proposed in relation to encountered challenges.

preprint2015arXiv

Relaxed dispersion constraints and metamaterial effective parameters with physical meaning for all frequencies

Metamaterial effective parameters may exhibit freedom from typical dispersion constraints. For instance, the emergence of a magnetic response in arrays of split-ring resonators for long wavelengths cannot be attained in a passive continuous system obeying the Kramers-Kronig relations. We characterize such freedom by identifying the three possible asymptotes which effective parameters can approach when analytically continued. Apart from their dispersion freedom, we also demonstrate that the effective parameters may be redefined in such a way that they have a certain physical meaning for all frequencies. There exists several possible definitions for the effective permittivity and permeability whereby this is achieved, thereby giving several possible frequency variations for high frequencies, while nevertheless converging to the same dispersion for long wavelengths.

preprint2013arXiv

Superpositions of Lorentzians as the class of causal functions

We prove that all functions obeying the Kramers-Kronig relations can be approximated as superpositions of Lorentzian functions, to any precision. As a result, the typical text-book analysis of dielectric dispersion response functions in terms of Lorentzians may be viewed as encompassing the whole class of causal functions. A further consequence is that Lorentzian resonances may be viewed as possible building blocks for engineering any desired metamaterial response, for example by use of split ring resonators of different parameters. Two example functions, far from typical Lorentzian resonance behavior, are expressed in terms of Lorentzian superpositions: A steep dispersion medium that achieves large negative susceptibility with arbitrarily low loss/gain, and an optimal realization of a perfect lens over a bandwidth. Error bounds are derived for the approximation.