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Blanka Detlefs

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physics.app-ph physics.ins-det

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preprint2020arXiv

TEXS: in-vacuum tender X-ray emission spectrometer with 11 Johansson crystal analyzers

We describe the design and show first results of a large solid angle X-ray emission spectrometer that is optimized for energies between 1.5 keV and 5.5 keV. The spectrometer is based on an array of 11 cylindrically bent Johansson crystal analyzers arranged in a non-dispersive Rowland circle geometry. The smallest achievable energy bandwidth is smaller than the core hole lifetime broadening of the absorption edges in this energy range. Energy scanning is achieved using an innovative design, maintaining the Rowland circle conditions for all crystals with only four motor motions. The entire spectrometer is encased in a high-vacuum chamber that allocates a liquid helium cryostat and provides sufficient space for in situ cells and operando catalysis reactors.

preprint2019arXiv

Reference-free GIXRF-XRR as a methodology for independent validation of XRR on ultrathin layer stacks and a depth-dependent characterization

Nanolayer stacks are technologically very relevant for current and future applications in many fields of research. A non-destructive characterization of such systems is often performed using X-ray reflectometry (XRR). For complex stacks of multiple layers, low electron density contrast materials or very thin layers without any pronounced angular minima, this requires a full modeling of the XRR data. As such modeling is using the thicknesses, the densities and the roughnesses of each layer as parameters, this approach quickly results in a large number of free parameters. In consquence, cross-correlation effects or interparameter dependencies can falsify the modeling results. Here, we present a route for validation of such modeling results which is based on the reference-free grazing incidence X-ray fluorescence (GIXRF) methodology. In conjunction with the radiometrically calibrated instrumentation of the Physikalisch-Technische Bundesanstalt the method allows for reference-free quantification of the elemental mass depositions. In addition, a modeling approach of reference-free GIXRF-XRR data is presented, which takes advantage of the quantifiable elemental mass depositions by distributing them depth dependently. This approach allows for a reduction of the free model parameters. Both the validation capabilities and the combined reference-free GIXRF-XRR modeling are demonstrated using several nanoscale layer stacks consisting of HfO$_2$ and Al$_2$O$_3$ layers.