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Anna Andrle

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Machine Learning physics.app-ph physics.data-an

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preprint2021arXiv

Invertible Neural Networks versus MCMC for Posterior Reconstruction in Grazing Incidence X-Ray Fluorescence

Grazing incidence X-ray fluorescence is a non-destructive technique for analyzing the geometry and compositional parameters of nanostructures appearing e.g. in computer chips. In this paper, we propose to reconstruct the posterior parameter distribution given a noisy measurement generated by the forward model by an appropriately learned invertible neural network. This network resembles the transport map from a reference distribution to the posterior. We demonstrate by numerical comparisons that our method can compete with established Markov Chain Monte Carlo approaches, while being more efficient and flexible in applications.

preprint2020arXiv

Grazing incidence-X-ray fluorescence for a dimensional and elemental characterization of well-ordered nanostructures

The increasing importance of well-controlled ordered nanostructures on surfaces represents a challenge for existing metrology techniques. To develop such nanostructures and monitor complex processing constraints fabrication, both a dimensional reconstruction of nanostructures and a characterization (ideally a quantitative characterization) of their composition is required. In this work, we present a soft X-ray fluorescence-based methodology that allows both of these requirements to be addressed at the same time. By applying the grazing-incidence X-ray fluorescence technique and thus utilizing the X-ray standing wave field effect, nanostructures can be investigated with a high sensitivity with respect to their dimensional and compositional characteristics. By varying the incident angles of the exciting radiation, element-sensitive fluorescence radiation is emitted from different regions inside the nanoobjects. By applying an adequate modeling scheme, these datasets can be used to determine the nanostructure characteristics. We demonstrate these capabilities by performing an element-sensitive reconstruction of a lamellar grating made of Si $_3$ N $_4$ , where GIXRF data for the O-K $α$ and N-K $α$ fluorescence emission allows a thin oxide layer to be reconstructed on the surface of the grating structure. In addition, we employ the technique also to three dimensional nanostructures and derive both dimensional and compositional parameters in a quantitative manner.

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