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Andrei Kolmakov

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Published work

6 published item(s)

preprint2026arXiv

Understanding microfabricated nanocalorimeter performance and responses to the energy fluxes from low-temperature plasma discharges

Plasma diagnostics have a shortage of fast and sensitive calorimetric sensors that can track substrate temperature during plasma-assisted microfabrication. In this work, energy fluxes from argon and oxygen radiofrequency (RF) glow discharges have been probed using a novel nanocalorimeter sensor. The probe consists of an ultrathin SiNx membrane (100 nm) with a lithographically defined Pt micro-strip (100 nm) that serves as a calibrated resistance thermometer. The sensor temperature can increase from room temperature to several hundred degrees within a second upon exposure to RF plasma, depending on the experiment's geometry and plasma parameters. Such sensitivity and response time are due to the pre-designed reduced heat capacity of the sensor and significantly reduced thermal conductance of the cooling channels. These features enable the sensitive detection of low-energy plasma fluxes on surfaces and their rapid discrimination, as in the case of ion and electron fluxes, by biasing the sensor at negative or positive potentials. These biased nanocalorimeter energy readings have been compared with ion and electron kinetic energy dissipations assessed using a Langmuir probe and retarding field energy analyzer (RFEA). Finally, the robustness of the plasma nanocalorimeter is discussed in terms of its baseline drifts, degradation, and longevity.

preprint2024arXiv

Operando Plasma-XPS for Process Monitoring: Hydrogenation of Copper Oxide Confined Under h-BN Case Study

We demonstrate that ambient pressure x-ray photoelectron spectroscopy (APXPS) can be used for in situ studies of dynamic changes in surface chemistry in a plasma environment. Hexagonal boron nitride (h-BN) was used in this study as a model system since it exhibits a wide array of unique chemical, optical, and electrical properties that make it a prospective material for advanced electronics. To better understand the stability and surface chemistry of h-BN during plasma-assisted processing, we used polycrystalline Cu foils with single-layer h-BN, grown via chemical vapor deposition (CVD), and tracked in real-time the plasma-induced reduction of the underlying Cu oxide using APXPS equipped with 22 kHz 75 W discharge plasma source operating at 13 Pa. Residual gas analysis (RGA) mass-spectra were concurrently collected during plasma-XPS to track reaction products formed during plasma exposure. A clear reduction of CuxO is seen, while an h-BN layer remains intact, suggesting H radical species can attack the exposed and h-BN-covered Cu oxide patches and partially reduce the underlying substrate. In addition to the demonstration and discussion of plasma-XPS capabilities, our results indicate the h-BN encapsulated metallic Cu interface might be repaired without significantly damaging the overlaying h-BN, which is of practical importance for the development of h-BN encapsulated devices and interfaces

preprint2020arXiv

Probing Electrified Liquid-Solid Interfaces with Scanning Electron Microscopy

Electrical double layers play a key role in a variety of electrochemical systems. The mean free path of secondary electrons in aqueous solutions is on the order of a nanometer, making them suitable for probing of ultrathin electrical double layers at solid-liquid electrolyte interfaces. Employing graphene as an electron-transparent electrode in a two-electrode electrochemical system, we show that the secondary electron yield of the graphene-liquid interface depends on the ionic strength and concentration of electrolyte and applied bias at the remote counter electrode. These observations have been related to polarization-induced changes in the potential distribution within the electrical double layer and demonstrate the feasibility of using scanning electron microscopy to examine and map electrified liquid-solid interfaces

preprint2015arXiv

Visible Light Assisted Gas Sensing with TiO2 Nanowires

Sensing response of individual single-crystal titania nanowires configured as chemiresistors for detecting reducing (CO, H2) and oxidizing (O2) gases is shown to be sensitive to visible light illumination. It is assumed that doping of the TiO2 nanowires with C and/or N during carbon assisted vapor-solid growth creates extrinsic states in the band gap close to the valence band maximum, which enables photoactivity at the photon energies of visible light. The inherently large surface-to-volume ratio of nanowires, along with facile transport of the photo-generated carriers to/from the nanowires surface promote the adsorption/desorption of donor/acceptor molecules, and therefore open the possibility for visible light assisted gas sensing. The photo-catalytic performance of TiO2 nanowire chemiresistors demonstrates the prospect of combining light harvesting and sensing action in a single nanostructure.

preprint2014arXiv

Ambient-Pressure X-ray Photoelectron Spectroscopy through Electron Transparent Graphene Membranes

Photoelectron spectroscopy (PES) and microscopy are highly demanded for exploring morphologically complex solid-gas and solid-liquid interfaces under realistic conditions, but the very small electron mean free path inside the dense media imposes serious experimental challenges. Currently, near ambient pressure PES is conducted using sophisticated and expensive electron energy analyzers coupled with differentially pumped electron lenses. An alternative economical approach proposed in this report uses ultrathin graphene membranes to isolate the ambient sample environment from the PES detection system. We demonstrate that the graphene membrane separating windows are both mechanically robust and sufficiently transparent for electrons in a wide energy range to allow PES of liquid and gaseous water. The reported proof-of-principle experiments also open a principal possibility to probe vacuum-incompatible toxic or reactive samples enclosed inside the hermetic environmental cells.

preprint2012arXiv

Electron transparent graphene windows for environmental scanning electron microscopy in liquids and dense gases

Due to its ultrahigh electron transmissivity in a wide electron energy range, molecular impermeability, high electrical conductivity and excellent mechanical stiffness the suspended graphene membranes appear to be a nearly ideal window material for in situ (in vivo) environmental electron microscopy of nano- and mesoscopic objects (including bio-medical samples) immersed in liquids and/or in dense gaseous media. In this communication, taking advantage of little modification of the graphene transfer protocol on to metallic and SiN supporting orifices, the reusable environmental cells with exchangeable graphene windows have been designed. Using colloidal gold nanoparticles (50 nm) dispersed in water as model objects for scanning electron microscopy in liquids, the different imaging conditions through graphene membrane have been tested. The limiting factors for electron microscopy in liquids such as electron beam induced water radiolysis and damage of graphene membrane at high electron doses were discussed.