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Viscous damping of nanobeam resonators: humidity, thermal noise and the paddling effect

The nanobeam resonator is the key mechanical component in the nano-electromechanical system. In addition to its high frequency originating from its low dimension, the performance is significantly influenced by the circumstances, especially at nanoscale where a large surface area of the material is exposed. Molecular dynamics simulations and theoretical analysis are used for a quantitative prediction on the damping behavior, such as the critical damping condition and lifetime, of nanobeam resonators that directly maps the fluid-structure properties and interaction information into dynamical behaviors. We show here how the humidity defines the critical damping condition through viscous forces, marking the transition from under-damping to over-damping regime at elevated humidity. Novel phenomena such as the thermal fluctuation and paddling effects are also discussed.