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Thin Film growth of Solid State materials

Magnetron sputtering has also been used to deposit thin films of some materials and it has significant technological importance. A modeling on deposition of epitaxial thin films of Yttrium Stabilized Zirconia (YSZ) was done the diffusion of adatom on the surface were studies. There exists a strong interaction of ions formed in the plasma during the sputtering process. Cu thin films were deposited on Si. Nanocomposite thin film of SiCN showed dendritic growth.

preprint2016arXivOpen access
A. S BhattacharyyaP. PrabhakarR. P. KumarS. SharmaS. K. RajR. RatnP. Kommu
cond-mat.mtrl-sci
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Open access7 authors1 topic
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A. S BhattacharyyaP. PrabhakarR. P. KumarS. SharmaS. K. RajR. RatnP. Kommu

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