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Paper detail

Photoacoustic Imaging Based on AlN MF-PMUT with Broadened Bandwidth

This paper reports an aluminum nitride (AlN) multi-frequency piezoelectric micromachined ultrasound transducers (MF-PMUT) array for photoacoustic (PA) imaging, where the broadened bandwidth is beneficial to improve imaging resolution. Specifically, PMUT based on micro-electromechanical systems (MEMS) technology is suitable for PA endoscopic imaging of blood vessels and bronchi due to its miniature size. More importantly, AlN is a non-toxic material, which makes it harmless for biomedical applications. In this work, a MF-PMUT array are designed and fabricated for PAI. The device's vibration mode impedance and bandwidth are analyzed. The MF-PMUT sensor provides a wider bandwidth (65%) signal detection, which increases the resolution of PAI compared with traditional PMUT. We conduct an experiment on agar sample to present sensor's performance in images' axial resolution.

preprint2022arXivOpen access
Junxiang CaiYiyun WangDaohuai JiangYuandongGuLiang LouFei GaoTao Wu
physics.med-ph
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Junxiang CaiYiyun WangDaohuai JiangYuandongGuLiang LouFei GaoTao Wu

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