On the dynamic pull-in instability in a mass-spring model of electrostatically actuated MEMS devices

preprint2016arXivOpen access

Abstract

In this work we study the mass-spring system \begin{equation} \ddot x + α\dot x + x = - \fracλ {(1+x)^{2}}, \label{e:inertia} \end{equation} which is a simplified model for an electrostatically actuated MEMS device. The static pull-in value is λ∗=427λ^{*}=\frac{4}{27}, which corresponds to the largest value of λλ for which there exists at least one stationary solution. For λ>λ∗λ> λ^{*} there are no stationary solutions and x(t)x(t) achieves the value −1-1 in finite time: {\it touchdown} occurs. We establish the existence of a dynamic pull-in value λd∗(α)∈(0,λ∗)λ_{d}^{*}(α) \in (0, λ^{*}), defined for α∈[0,∞)α\in [0,\infty), which is a threshold in the sense that x(t)x(t) approaches a stable stationary solution as t→∞t \to \infty for 0<λ<λd∗(α)0 < λ< λ_{d}^{*}(α), while touchdown occurs for λ>λd∗(α)λ> λ_{d}^{*}(α). This dynamic pull-in value is a continuous, strictly increasing function of αα and lim⁡α→∞λd∗(α)=λ∗\lim_{α\to\infty} λ_{d}^{*}(α)= λ^{*}.

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