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Nucleation and growth of HfO$_2$ layers on graphene by CVD

A seed layer-free growth of HfO$_2$ on commercially available CVD graphene from various suppliers is investigated. It is revealed that the samples of monolayer graphene transferred from Cu to SiO$_2$/Si substrates have different coverage with bi- and multi-layer graphene islands. We find that the distribution and number of such islands impact the nucleation and growth of HfO$_2$ by CVD. In particular, we show that the edges and surface of densely distributed bi-layer graphene islands provide good nucleation sites for conformal CVD HfO$_2$ layers. Dielectric constant of 16 is extracted from measurements on graphene- HfO$_2$-TiN capacitors.

preprint2013arXivOpen access
Grzegorz LupinaMindaugas LukosiusJulia KitzmannJarek DabrowskiAndre WolffWolfgang Mehr
cond-mat.mtrl-sci
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Open access6 authors1 topic
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Grzegorz LupinaMindaugas LukosiusJulia KitzmannJarek DabrowskiAndre WolffWolfgang Mehr

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