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Paper detail

Multimode internal resonances in a MEMS self-sustained oscillator

We investigate the dynamics of a microelectromechanical (MEMS) self-sustained oscillator supporting multiple resonating and interacting modes. In particular, the interaction of the first four flexural modes along with the first torsional mode are studied, whereby 1:2, 1:3, and 2:1 internal resonances occur. Even and odd modes are induced to couple by breaking the longitudinal symmetry of the structure. Self-oscillations are induced in the second flexural mode via a gain-feedback loop, thereafter its frequency is pulled into a commensurate frequency ratio with the other modes, enabling the oscillator to act as a driver/pump for four modes simultaneously. Thus, by leveraging multiple internal resonances, a five modes frequency-locked comb is generated.

preprint2019arXivOpen access
S. HouriD. HatanakaM. AsanoH. Yamaguchi
cond-mat.mes-hallphysics.app-ph
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S. HouriD. HatanakaM. AsanoH. Yamaguchi

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