Abstract
In this work, we employ a kinetic theory based approach to predict the hydrodynamic forces on electromechanical resonators operating in gaseous media. Using the Boltzmann-BGK equation, we investigate the influence of the resonator geometry on the fluid resistance in the entire range of nondimensional frequency variation ; here the fluid relaxation time is determined by the gas viscosity and pressure at thermodynamic equilibrium, and is the (angular) oscillation frequency. Our results support the experimentally observed transition from viscous to viscoelastic flow in simple gases at . They are also in remarkable agreement with the measured geometric effects in resonators in a broad linear dimension, frequency, and pressure range.
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